Design and analysis of a novel flexure-based XY micro-positioning stage driven by electromagnetic actuators

Shunli Xiao, Yangmin Li, Xinhua Zhao

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

29 Citations (Scopus)


The paper presents the design and analysis of a novel compliant flexure-based totally decoupled XY micro-positioning stage which is driven by electromagnetic actuators. The stage is constructed with a very simple structure by employing double parallelogram flexures and four contactless electromagnetic force actuators. The kinematics and dynamic modeling of the mechanical system of the stage are conducted by resorting to compliance and stiffness analysis based on matrix method, and analytical models for electromagnetic forces are also established, both mechanical structure and electromagnetic model are validated by finite element analysis(FEA) via AN-SYS. The mechanical structure is analyzed in a multi-physics environmental simulation and electromagnetic actuators are applied in ANSYS too. Both FEA and the analytical models well demonstrate that the movement of the stage is totally decoupled. With the parameters given in the paper, the moving range can reach 1mm 1mm and the resolution can reach 0.1 m at least, which is mainly limited by the displacement sensor's accuracy in our laboratory.
Original languageEnglish
Title of host publicationProceedings of 2011 International Conference on Fluid Power and Mechatronics, FPM 2011
Number of pages6
Publication statusPublished - 10 Nov 2011
Externally publishedYes
Event2011 International Conference on Fluid Power and Mechatronics, FPM 2011 - Beijing, China
Duration: 17 Aug 201120 Aug 2011


Conference2011 International Conference on Fluid Power and Mechatronics, FPM 2011

ASJC Scopus subject areas

  • Fluid Flow and Transfer Processes
  • Electrical and Electronic Engineering
  • Mechanical Engineering

Cite this