Design and analysis of a new high precision decoupled XY compact parallel micromanipulator

Keyphrases

• Micromanipulator 100%
• Parallel Micromanipulator 100%
• Micro-nano Manipulation 66%
• Actuator 33%
• Design Procedure 33%
• Nanotechnology 33%
• Positioning Application 33%
• Control System 33%
• Analysis Procedure 33%
• Finite Element Analysis 33%
• Precise Measurement 33%
• Matrix Method 33%
• New Research Directions 33%
• Translator 33%
• Flexure Hinge 33%
• Stiffness Analysis 33%
• Serial Communication 33%
• Automatic Control 33%
• Precision Machinery 33%
• XY Stage 33%
• Compliance Analysis 33%
• Kinematic Modeling 33%
• Decoupler 33%
• Bridge Amplifier 33%
• Control Precision 33%
• Two-stage Amplifier 33%
• Bridge Principles 33%

Engineering

• Amplifier 100%
• Microscale 50%
• Piezoelectric 50%
• Serial Connection 50%
• Precise Measurement 50%
• Flexure Hinge 50%
• Stage Amplifier 50%
• Control Systems 50%
• Finite Element Analysis 50%
• Actuator 50%
• Matrix Method 50%
• Automatic Control 50%