Design and analysis of a completely decoupled compliant parallel XY micro-motion stage

Jiming Huang; Yangmin Li

doi:10.1109/ROBIO.2010.5723464

Design and analysis of a completely decoupled compliant parallel XY micro-motion stage

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

12 Citations (Scopus)

Abstract

With the purpose of designing a completely decoupled XY micro-motion stage, a novel flexure hinge-based compliant parallel mechanism driven by piezoelectric actuators (PZT) is presented in this paper. The mechanism with a double symmetric structure is constructed by employing double four-bar flexures as prismatic joints due to their better stiffness performance. To obtain an accurate model, matrix method is applied for the compliance analysis. Then the dynamics model is derived via Lagrange equation. Finally, finite element analysis (FEA) is carried out using ANSYS software to validate the models and evaluate the performance of the mechanism. The simulation results also reveal that the mechanism has ideal linearity in terms of the static properties.

Original language	English
Title of host publication	2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010
Pages	1008-1013
Number of pages	6
DOIs	https://doi.org/10.1109/ROBIO.2010.5723464
Publication status	Published - 1 Dec 2010
Externally published	Yes
Event	2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010 - Tianjin, China Duration: 14 Dec 2010 → 18 Dec 2010

Conference

Conference	2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010
Country/Territory	China
City	Tianjin
Period	14/12/10 → 18/12/10

ASJC Scopus subject areas

Artificial Intelligence
Biotechnology
Human-Computer Interaction

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10.1109/ROBIO.2010.5723464

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title = "Design and analysis of a completely decoupled compliant parallel XY micro-motion stage",

abstract = "With the purpose of designing a completely decoupled XY micro-motion stage, a novel flexure hinge-based compliant parallel mechanism driven by piezoelectric actuators (PZT) is presented in this paper. The mechanism with a double symmetric structure is constructed by employing double four-bar flexures as prismatic joints due to their better stiffness performance. To obtain an accurate model, matrix method is applied for the compliance analysis. Then the dynamics model is derived via Lagrange equation. Finally, finite element analysis (FEA) is carried out using ANSYS software to validate the models and evaluate the performance of the mechanism. The simulation results also reveal that the mechanism has ideal linearity in terms of the static properties.",

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Design and analysis of a completely decoupled compliant parallel XY micro-motion stage. / Huang, Jiming; Li, Yangmin.
2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010. 2010. p. 1008-1013 5723464.

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

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Design and analysis of a completely decoupled compliant parallel XY micro-motion stage

Abstract

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ASJC Scopus subject areas

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