Design and analysis of a completely decoupled compliant parallel XY micro-motion stage

Jiming Huang, Yangmin Li

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

12 Citations (Scopus)

Abstract

With the purpose of designing a completely decoupled XY micro-motion stage, a novel flexure hinge-based compliant parallel mechanism driven by piezoelectric actuators (PZT) is presented in this paper. The mechanism with a double symmetric structure is constructed by employing double four-bar flexures as prismatic joints due to their better stiffness performance. To obtain an accurate model, matrix method is applied for the compliance analysis. Then the dynamics model is derived via Lagrange equation. Finally, finite element analysis (FEA) is carried out using ANSYS software to validate the models and evaluate the performance of the mechanism. The simulation results also reveal that the mechanism has ideal linearity in terms of the static properties.
Original languageEnglish
Title of host publication2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010
Pages1008-1013
Number of pages6
DOIs
Publication statusPublished - 1 Dec 2010
Externally publishedYes
Event2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010 - Tianjin, China
Duration: 14 Dec 201018 Dec 2010

Conference

Conference2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010
Country/TerritoryChina
CityTianjin
Period14/12/1018/12/10

ASJC Scopus subject areas

  • Artificial Intelligence
  • Biotechnology
  • Human-Computer Interaction

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