Design and analysis of a 3-DOF planar micromanipulation stage with large rotational displacement for micromanipulation system

Keyphrases

• Three Degrees of Freedom 100%
• Rotational Displacement 100%
• Micromanipulation System 100%
• Micro-manipulation Stage 100%
• Beam Flexure 100%
• Pre-tightening 100%
• Scanning Tunneling Microscopy 50%
• Piezoelectric Actuator 50%
• Manipulator 50%
• Forward Kinematics 50%
• Workspace 50%
• Kinematic Model 50%
• Servo 50%
• Flexure Hinge 50%
• Micromanipulator 50%
• Tool System 50%
• Revolute Joint 50%
• Micro-nano Manipulation 50%
• Nanoimprint Lithography 50%
• Circular Flexure Hinge 50%
• Inverse Kinematic Model 50%
• Stack Actuator 50%
• Flexure Mechanism 50%
• Lever Mechanism 50%
• Large Workspace 50%

Engineering

• Degree of Freedom 100%
• Rotational 100%
• Micromanipulation 100%
• Flexure 66%
• Flexure Hinge 66%
• Kinematic Model 66%
• Forward Kinematics 33%
• Revolute Joint 33%
• Nanoimprint Lithography 33%
• Lever Mechanism 33%
• Manipulator 33%
• Scanning Tunneling Microscopy 33%
• Inverse Kinematics 33%
• Actuator 33%
• Servomotors 33%
• Piezoelectric Actuator 33%