Design and analysis of a 3-DOF planar micromanipulation stage with large rotational displacement for micromanipulation system

Bingxiao Ding, Yangmin Li, Xiao Xiao, Yirui Tang, Bin Li

Research output: Journal article publicationJournal articleAcademic researchpeer-review

19 Citations (Scopus)


Flexure-based mechanisms have been widely used for scanning tunneling microscopy, nanoimprint lithography, fast servo tool system and micro/nano manipulation. In this paper, a novel planar micromanipulation stage with large rotational displacement is proposed. The designed monolithic manipulator has three degrees of freedom (DOF), i.e. two translations along the X and Y axes and one rotation around Z axis. In order to get a large workspace, the lever mechanism is adopted to magnify the stroke of the piezoelectric actuators and also the leaf beam flexure is utilized due to its large rotational scope. Different from conventional pre-tightening mechanism, a modified pre-tightening mechanism, which is less harmful to the stacked actuators, is proposed in this paper. Taking the circular flexure hinges and leaf beam flexures hinges as revolute joints, the forward kinematics and inverse kinematics models of this stage are derived. The workspace of the micromanipulator is finally obtained, which is based on the derived kinematic models.
Original languageEnglish
Pages (from-to)117-126
Number of pages10
JournalMechanical Sciences
Issue number1
Publication statusPublished - 23 May 2017

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Civil and Structural Engineering
  • Mechanics of Materials
  • Mechanical Engineering
  • Fluid Flow and Transfer Processes
  • Industrial and Manufacturing Engineering

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