Abstract
This paper presents the design of an approximately decoupled XY micro-motion stage, which adopts the double four-bar prismatic joints to transfer linear motions and a proper type of displacement amplifier. The compliance models of the amplifier, the prismatic joints, and the whole stage are established based on the flexibility matrix method. Based on the input compliance model, the amplification ratio is elaborated. The simulation is made by using finite element analysis software, the simulation results show that the input/output of the stage has a very good linearity, the ratio of output displacement to input displacement is 4. The output cross-talk is less than 2% and the parasitic motions of the input points in the other limbs are less than 1.8%, which shows a good decoupling property.
| Original language | English |
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| Title of host publication | 2012 12th International Conference on Control, Automation, Robotics and Vision, ICARCV 2012 |
| Pages | 1335-1340 |
| Number of pages | 6 |
| DOIs | |
| Publication status | Published - 1 Dec 2012 |
| Externally published | Yes |
| Event | 2012 12th International Conference on Control, Automation, Robotics and Vision, ICARCV 2012 - Guangzhou, China Duration: 5 Dec 2012 → 7 Dec 2012 |
Conference
| Conference | 2012 12th International Conference on Control, Automation, Robotics and Vision, ICARCV 2012 |
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| Country/Territory | China |
| City | Guangzhou |
| Period | 5/12/12 → 7/12/12 |
Keywords
- amplification mechanism
- double four-bar prismatic joints
- finite element analysis
- matrix method
- the cross-talk
ASJC Scopus subject areas
- Artificial Intelligence
- Computer Vision and Pattern Recognition
- Human-Computer Interaction
- Control and Systems Engineering