Design and analysis of a 2-DOF micro-motion stage based on flexural hinges

Longquan Xi, Yangmin Li, Xinhua Zhao

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

7 Citations (Scopus)

Abstract

This paper presents the design of an approximately decoupled XY micro-motion stage, which adopts the double four-bar prismatic joints to transfer linear motions and a proper type of displacement amplifier. The compliance models of the amplifier, the prismatic joints, and the whole stage are established based on the flexibility matrix method. Based on the input compliance model, the amplification ratio is elaborated. The simulation is made by using finite element analysis software, the simulation results show that the input/output of the stage has a very good linearity, the ratio of output displacement to input displacement is 4. The output cross-talk is less than 2% and the parasitic motions of the input points in the other limbs are less than 1.8%, which shows a good decoupling property.
Original languageEnglish
Title of host publication2012 12th International Conference on Control, Automation, Robotics and Vision, ICARCV 2012
Pages1335-1340
Number of pages6
DOIs
Publication statusPublished - 1 Dec 2012
Externally publishedYes
Event2012 12th International Conference on Control, Automation, Robotics and Vision, ICARCV 2012 - Guangzhou, China
Duration: 5 Dec 20127 Dec 2012

Conference

Conference2012 12th International Conference on Control, Automation, Robotics and Vision, ICARCV 2012
Country/TerritoryChina
CityGuangzhou
Period5/12/127/12/12

Keywords

  • amplification mechanism
  • double four-bar prismatic joints
  • finite element analysis
  • matrix method
  • the cross-talk

ASJC Scopus subject areas

  • Artificial Intelligence
  • Computer Vision and Pattern Recognition
  • Human-Computer Interaction
  • Control and Systems Engineering

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