Design and analysis of a 2-DOF micro-motion stage based on differential amplifier

Xiaofeng Li, Yangmin Li

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

2 Citations (Scopus)

Abstract

In the field of the micro/nano operations, like micro, assembly engineering, biological engineering, ultraprecision machining and military needed precision operation and control , we need to use with micron, sub-micron or even nanometer resolution of micromanipulator. Micro positioning platform is an important carrier of precision positioning technology. The purpose of this paper is to design a flexible hinge amplification mechanism with novel micro operation function, the platform precision can reach micron level. As the XY micro positioning platform driven by piezoelectric actuator is based on a magnifying mechanism in terms of principle of differential amplification. Stress and displacement analysis are conducted on the mechanism, the mathematical model of displacement amplification is established, and the finite element analysis is performed, at last the designed stage is verified through simulations.
Original languageEnglish
Title of host publication2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013
Pages472-477
Number of pages6
DOIs
Publication statusPublished - 1 Dec 2013
Externally publishedYes
Event2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013 - Beijing, China
Duration: 5 Aug 20138 Aug 2013

Conference

Conference2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013
Country/TerritoryChina
CityBeijing
Period5/08/138/08/13

Keywords

  • Nanoassemblies and devices
  • Nanomanipulation
  • Nanorobotics

ASJC Scopus subject areas

  • Bioengineering
  • Electrical and Electronic Engineering
  • Materials Chemistry
  • Condensed Matter Physics

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