Design and analysis of a 2-DOF micro-motion stage based on differential amplifier

Xiaofeng Li; Yangmin Li

doi:10.1109/NANO.2013.6720995

Design and analysis of a 2-DOF micro-motion stage based on differential amplifier

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

5 Citations (Scopus)

Abstract

In the field of the micro/nano operations, like micro, assembly engineering, biological engineering, ultraprecision machining and military needed precision operation and control , we need to use with micron, sub-micron or even nanometer resolution of micromanipulator. Micro positioning platform is an important carrier of precision positioning technology. The purpose of this paper is to design a flexible hinge amplification mechanism with novel micro operation function, the platform precision can reach micron level. As the XY micro positioning platform driven by piezoelectric actuator is based on a magnifying mechanism in terms of principle of differential amplification. Stress and displacement analysis are conducted on the mechanism, the mathematical model of displacement amplification is established, and the finite element analysis is performed, at last the designed stage is verified through simulations.

Original language	English
Title of host publication	2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013
Pages	472-477
Number of pages	6
DOIs	https://doi.org/10.1109/NANO.2013.6720995
Publication status	Published - 1 Dec 2013
Externally published	Yes
Event	2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013 - Beijing, China Duration: 5 Aug 2013 → 8 Aug 2013

Conference

Conference	2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013
Country/Territory	China
City	Beijing
Period	5/08/13 → 8/08/13

Keywords

Nanoassemblies and devices
Nanomanipulation
Nanorobotics

ASJC Scopus subject areas

Bioengineering
Electrical and Electronic Engineering
Materials Chemistry
Condensed Matter Physics

More information

10.1109/NANO.2013.6720995

Cite this

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abstract = "In the field of the micro/nano operations, like micro, assembly engineering, biological engineering, ultraprecision machining and military needed precision operation and control , we need to use with micron, sub-micron or even nanometer resolution of micromanipulator. Micro positioning platform is an important carrier of precision positioning technology. The purpose of this paper is to design a flexible hinge amplification mechanism with novel micro operation function, the platform precision can reach micron level. As the XY micro positioning platform driven by piezoelectric actuator is based on a magnifying mechanism in terms of principle of differential amplification. Stress and displacement analysis are conducted on the mechanism, the mathematical model of displacement amplification is established, and the finite element analysis is performed, at last the designed stage is verified through simulations.",

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AU - Li, Yangmin

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Design and analysis of a 2-DOF micro-motion stage based on differential amplifier

Abstract

Conference

Keywords

ASJC Scopus subject areas

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