Design, analysis, and test of a novel 2-DOF nanopositioning system driven by dual mode

Keyphrases

• Active Disturbance Rejection Controller 50%
• Amplification Ratio 50%
• Atomic Force Microscope 100%
• Creep Effect 50%
• Cross-coupling 50%
• Design Analysis 100%
• Design Test 100%
• Dimensional Optimization 50%
• Dual-mode 100%
• Extended State Observer 50%
• Finite Element Analysis 50%
• First-order Natural Frequency 50%
• Flexure 50%
• Flexure-based 50%
• Four-bar 50%
• High Performance 100%
• Hysteresis Nonlinearity 50%
• Kinetostatics 50%
• Large Workspace 50%
• Lever Displacement Amplifier 50%
• Mechanical Performance Evaluation 50%
• Mechanism Design 50%
• Motion Stage 50%
• Nanopositioning Stage 50%
• Nanopositioning System 100%
• Noise Disturbance 50%
• Nonlinear State Error Feedback (NLSEF) 50%
• Nonlinearity 50%
• Parallelogram 50%
• Particle Swarm Optimization Algorithm 50%
• Plant Uncertainty 50%
• Positioning Precision 50%
• Prismatic Joint 50%
• Sensor Noise 50%
• Tracking Differentiator 50%
• Two-axis 100%
• Two-degree-of-freedom 100%
• Unknown Disturbances 50%
• Workspace 100%

Engineering

• Amplification Ratio 50%
• Amplifier 50%
• Atomic Force Microscope 100%
• Creep 50%
• Cross-Coupling 50%
• Design Analysis 100%
• Differentiator 50%
• Dimension Optimization 50%
• Driven System 100%
• Extended State Observer 50%
• Finite Element Analysis 50%
• Flexure 100%
• Mechanical Performance 50%
• Mechanism Design 50%
• Nanopositioning Stage 50%
• Nonlinearity 100%
• Particle Swarm Optimization 50%
• Prismatic Joint 50%
• Realization 50%
• Resonant Frequency 50%
• Sensor Noise 50%
• State Error 50%
• Test Result 50%
• Two Degree of Freedom 100%