Dependence of electrical and optical properties of ZnO films on substrate temperature

X. L. Xu, Shu Ping Lau, J. S. Chen, Z. Sun, B. K. Tay, J. W. Chai

Research output: Journal article publicationJournal articleAcademic researchpeer-review

49 Citations (Scopus)


ZnO films were prepared by filtered cathodic vacuum arc technique with Zn target at different substrate temperatures. The crystallinity is enhanced with increasing substrate temperature and preferably oriented at (1 0 3) direction when the substrate temperature is higher than 230°C. The PL emission corresponding to the exciton transition at 3.37 eV can be observed at room temperature, which indicates that high-quality films have been obtained by this technique. The Hall mobility, which increases with substrate temperature, is dominated by grain boundary scattering.
Original languageEnglish
Pages (from-to)617-620
Number of pages4
JournalMaterials Science in Semiconductor Processing
Issue number6
Publication statusPublished - 1 Dec 2001
Externally publishedYes


  • Filtered cathodic vacuum arc
  • Photoluminescence
  • Zinc oxide films

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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