Densely packed arrays of ultra-high-as pect-ratio silicon nanowires fabricated using block-copolymer lithography and metal-assisted etching

Shih Wei Chang, Vivian P. Chuang, Steven Tyler Boles, Caroline A. Ross, Carl V. Thompson

Research output: Journal article publication › Journal article › Academic research › peer-review

193 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Densely packed arrays of ultra-high-as pect-ratio silicon nanowires fabricated using block-copolymer lithography and metal-assisted etching'. Together they form a unique fingerprint.

Physics

Material Science

Engineering