Densely packed arrays of ultra-high-as pect-ratio silicon nanowires fabricated using block-copolymer lithography and metal-assisted etching

Shih Wei Chang, Vivian P. Chuang, Steven Tyler Boles, Caroline A. Ross, Carl V. Thompson

Research output: Journal article publication › Journal article › Academic research › peer-review

204 Citations (Scopus)

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Engineering

Material Science