@inproceedings{a12d99593a124694a2c8958cc00efff7,
title = "Demonstration of a single-chip integrated MEMS tunable laser with a large wavelength tuning range",
abstract = "This paper presents an on-chip miniaturized MEMS tunable laser, with a 3-dimensional micro coupling system to improve the coupling efficiency and side mode suppression radio. The prototype is fabricated on an SOI wafer by DRIE process. It obtains a coupling efficiency as high as 76.5%. It offers an improved tuning over a range of 48 nm. Compared with other hybrid-integrated tunable lasers, the compact MEMS tunable laser has merits as fast tuning speed, large tuning range, and a single-chip solution.",
author = "H. Cai and Tao, {J. F.} and Gu, {Y. D.} and Kwong, {D. L.} and Liu, {A. Q.}",
year = "2013",
month = dec,
doi = "10.1109/IEDM.2013.6724656",
language = "English",
isbn = "9781479923076",
series = "Technical Digest - International Electron Devices Meeting, IEDM",
pages = "18.6.1--18.6.4",
booktitle = "2013 IEEE International Electron Devices Meeting, IEDM 2013",
note = "2013 IEEE International Electron Devices Meeting, IEDM 2013 ; Conference date: 09-12-2013 Through 11-12-2013",
}