Demonstrating applications of non-optically regulated tapping-mode near-field scanning optical microscopy to nano-optical metrology and optical characterization of semiconductors

N.H. Lu, S. De Chang, G.-B. Huang, H.J. Huang, Y.S. Huang, H.-P. Chiang, Din-ping Tsai

Research output: Journal article publicationJournal articleAcademic researchpeer-review

2 Citations (Scopus)

Abstract

We demonstrate the applications of a near-field scanning optical microscopy (NSOM) system based on a short-probe tappingmode tuning fork (TMTF) configuration to nano-optical metrology and the optical characterization of semiconductors. The short-probe TMTF-NSOM system is constructed to operate in both collection and excitation modes, in which a cleaved short fiber probe attached to one tine of the tuning fork is used as a light collector/emitter as well as a force-sensing element. Interference fringes due to standing evanescent waves generated by total internal reflection are imaged in the collection mode. Excitation-mode short-probe TMTF-NSOM is applied to near-field surface photovoltage measurement on distributed-Braggreflector-enhanced absorbing substrate AlGaInP light-emitting diode structures. © 2006 The Japan Society of Applied Physics.
Original languageEnglish
Pages (from-to)2187-2192
Number of pages6
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume45
Issue number3 B
DOIs
Publication statusPublished - 27 Mar 2006
Externally publishedYes

Keywords

  • Evanescent field
  • Interference
  • Nano-optical metrology
  • Near-field scanning optical microscopy
  • Short probe
  • Surface photovoltage
  • Tapping mode
  • Total internal reflection
  • Tuning fork

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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