Deformation patterns of a micropositioning table under a moving force

Y. Gao, S. Tse, S. Ko, Wai Lok Chan

Research output: Journal article publicationJournal articleAcademic researchpeer-review

2 Citations (Scopus)


For high precision machining, force induced deformation should be compensated. A micropositioning table is designed to actuate workpieces for compensation with increased effectiveness. To better understand the characteristics of the table, the deformation patterns and stiffness distribution of the table under a moving force are investigated using a computational finite element analysis approach, as the moving speed is not particularly high and the transient and damping effects can be neglected. The investigation is important for the design of the table for dynamic control. It was found that the top piece of the table is almost a rigid body and the maximum open loop stiffness is found near the center of the top surface. A comparison with the experimental results is made to validate the analysis.
Original languageEnglish
Pages (from-to)363-368
Number of pages6
JournalKey Engineering Materials
Publication statusPublished - 13 Mar 2003
Externally publishedYes


  • Deformation patterns
  • FEA
  • Grinding force
  • Micropositioning table

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering


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