Abstract
For high precision machining, force induced deformation should be compensated. A micropositioning table is designed to actuate workpieces for compensation with increased effectiveness. To better understand the characteristics of the table, the deformation patterns and stiffness distribution of the table under a moving force are investigated using a computational finite element analysis approach, as the moving speed is not particularly high and the transient and damping effects can be neglected. The investigation is important for the design of the table for dynamic control. It was found that the top piece of the table is almost a rigid body and the maximum open loop stiffness is found near the center of the top surface. A comparison with the experimental results is made to validate the analysis.
| Original language | English |
|---|---|
| Pages (from-to) | 363-368 |
| Number of pages | 6 |
| Journal | Key Engineering Materials |
| Volume | 238-239 |
| Publication status | Published - 13 Mar 2003 |
| Externally published | Yes |
Keywords
- Deformation patterns
- FEA
- Grinding force
- Micropositioning table
ASJC Scopus subject areas
- General Materials Science
- Mechanics of Materials
- Mechanical Engineering