Defects in annealed 1.5 MeV boron implanted p-type silicon

Jiyan Dai, K. K. Ong, D. Z. Chi, M. H. Liang, K. C. Leong, L. Chan, S. K. Lahiri

Research output: Journal article publicationJournal articleAcademic researchpeer-review

Fingerprint

Dive into the research topics of 'Defects in annealed 1.5 MeV boron implanted p-type silicon'. Together they form a unique fingerprint.

Keyphrases

Material Science