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Keyphrases
Reaction Pathway
100%
Rate Coefficients
100%
Decomposition Reaction
100%
Hexafluoropropylene Oxide
100%
CCSD(T)
55%
Temperature Range
55%
Minimum Energy Path
33%
Low Temperature
11%
Variational
11%
Reaction Mechanism
11%
Electronics Industry
11%
Activation Energy
11%
Stationary Point
11%
Experimental Values
11%
Potential Energy Surface
11%
Selected Temperature
11%
Thermal Decomposition
11%
Reaction Kinetics
11%
Activation Rate
11%
Reaction Enthalpy
11%
Two-pathway
11%
Tunneling
11%
Complete Basis Set Limit
11%
MP2 Method
11%
Dual-level
11%
Direct Dynamics Method
11%
Energy Coefficient
11%
P-energy
11%
Fluorocarbon Film
11%
Thin Film Preparation
11%
Canonical Variational Theory
11%
Small Curvature Tunneling
11%
Thermolysis Reaction
11%
Engineering
Temperature Range
100%
Discrete Fourier Transform
100%
Trenchless Method
40%
Low-Temperature
20%
Experimental Measurement
20%
Theoretical Investigation
20%
Good Agreement
20%
Selected Temperature
20%
Experimental Value
20%
Potential Energy
20%
Film Preparation
20%
Energy Surface
20%
Thin Films
20%
Limit Set
20%
Stationary Point
20%
Activation Energy
20%
Dynamic Method
20%
Electronics Industry
20%
Functionals
20%
Chemistry
Density Functional Theory
100%
Reaction Path
100%
Chemical Decomposition
100%
Møller-Plesset Perturbation Theory
100%
Reaction Enthalpy
20%
Pyrolysis
20%
Reaction Activation Energy
20%
Potential Energy Surface
20%
Fluorocarbon
20%
electronics
20%
Material Science
Chemical Decomposition
100%
Oxide Compound
100%
Thin Film Processing Method
50%
Surface Energy
50%
Activation Energy
50%
Chemical Engineering
Enthalpy
100%
Fluorocarbon
100%
Film
100%