Cutting properties of deposited amorphous silicon in ultra-precision machining

Keyphrases

• Ultra-precision Machining 100%
• Amorphous Silicon 100%
• Cutting Property 100%
• Critical Depth of Cut 50%
• Cutting Force 33%
• Polysilicon 33%
• Multicrystalline Silicon 33%
• Optical Devices 33%
• Electronics Industry 16%
• Semiconductors 16%
• Tool Wear 16%
• Silicon Material 16%
• Cutting Orientation 16%
• Mechanical Cutting 16%
• Materials for Optical Devices 16%
• Cutting Control 16%

Engineering

• Critical Depth 100%
• Cutting Force 66%
• Polysilicon 66%
• Promising Candidate 33%
• Silicon Single Crystal 33%
• Crystalline Silicon 33%
• Mechanical Cutting 33%
• Cutting Time 33%
• Silicon Material 33%
• Electronics Industry 33%

Material Science

• Machining 100%
• Amorphous Silicon 100%
• Silicon 66%
• Optical Device 50%
• Silicon Material 16%
• Single Crystal 16%
• Crystalline Material 16%
• Amorphous Material 16%