Crystalline SrTiO3 thin films on silicon by pulsed laser deposition

Jianhua Hao; J. Gao

doi:10.1142/S0217979205028980

Crystalline SrTiO3 thin films on silicon by pulsed laser deposition

Research output: Journal article publication › Journal article › Academic research › peer-review

Abstract

We have developed a process to grow SrTiO3(STO) thin films showing single (110) orientation directly on Si by means of pulsed laser deposition technique. The growth of STO films directly on Si has been described. The crystallinity of the grown STO films was characterized by X-ray diffraction analysis of θ - 2θ scan and rocking curve. Our results may be of interest for better understanding of the growth based on the perovskite oxide thin films on silicon materials.

Original language	English
Pages (from-to)	533-535
Number of pages	3
Journal	International Journal of Modern Physics B
Volume	19
Issue number	1-3
DOIs	https://doi.org/10.1142/S0217979205028980
Publication status	Published - 3 Jan 2005
Externally published	Yes

Keywords

Dielectric thin film
Orientation
Silicon

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)
Condensed Matter Physics
Electronic, Optical and Magnetic Materials
Statistical and Nonlinear Physics
Mathematical Physics

More information

10.1142/S0217979205028980

Cite this

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AB - We have developed a process to grow SrTiO3(STO) thin films showing single (110) orientation directly on Si by means of pulsed laser deposition technique. The growth of STO films directly on Si has been described. The crystallinity of the grown STO films was characterized by X-ray diffraction analysis of θ - 2θ scan and rocking curve. Our results may be of interest for better understanding of the growth based on the perovskite oxide thin films on silicon materials.

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KW - Silicon

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Crystalline SrTiO3 thin films on silicon by pulsed laser deposition

Abstract

Keywords

ASJC Scopus subject areas

More information

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