Crystalline SrTiO3 thin films on silicon by pulsed laser deposition

Jianhua Hao, J. Gao

Research output: Journal article publicationJournal articleAcademic researchpeer-review

Abstract

We have developed a process to grow SrTiO3(STO) thin films showing single (110) orientation directly on Si by means of pulsed laser deposition technique. The growth of STO films directly on Si has been described. The crystallinity of the grown STO films was characterized by X-ray diffraction analysis of θ - 2θ scan and rocking curve. Our results may be of interest for better understanding of the growth based on the perovskite oxide thin films on silicon materials.
Original languageEnglish
Pages (from-to)533-535
Number of pages3
JournalInternational Journal of Modern Physics B
Volume19
Issue number1-3
DOIs
Publication statusPublished - 3 Jan 2005
Externally publishedYes

Keywords

  • Dielectric thin film
  • Orientation
  • Silicon

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials
  • Statistical and Nonlinear Physics
  • Mathematical Physics

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