Control of a MEMS optical switch

B. Borovic; C. Hong; A. Q. Liu; L. Xie; F. L. Lewis

doi:10.1109/cdc.2004.1428930

Control of a MEMS optical switch

B. Borovic, C. Hong, A. Q. Liu, L. Xie, F. L. Lewis

Research output: Journal article publication › Conference article › Academic research › peer-review

52 Citations (Scopus)

Abstract

An analysis is performed of a MEMS optical switch to determine a dynamical model containing electrical, mechanical, and optical components. The model is compared to experimental results and shows a good match, aside from the damping term which is difficult to analyze. Improved parameters are determined by system identification from the actual experimental data. The improved model is used to design a controller that has two parts, a feedforward part and a feedback part. The feedforward portion, not normalized in MEMS control, is shown to be instrumental in obtaining fast optical switching with minimal overshoot.

Original language	English
Article number	ThA09.2
Pages (from-to)	3039-3044
Number of pages	6
Journal	Proceedings of the IEEE Conference on Decision and Control
Volume	3
DOIs	https://doi.org/10.1109/cdc.2004.1428930
Publication status	Published - Dec 2004
Externally published	Yes
Event	2004 43rd IEEE Conference on Decision and Control (CDC) - Nassau, Bahamas Duration: 14 Dec 2004 → 17 Dec 2004

Keywords

Control
Electrostatic actuator
MEMS
Modeling
Optical switch

ASJC Scopus subject areas

Control and Systems Engineering
Modelling and Simulation
Control and Optimization

More information

10.1109/cdc.2004.1428930

Cite this

@article{f28fd178dba84c0daf177c7df4f1b1d5,

title = "Control of a MEMS optical switch",

abstract = "An analysis is performed of a MEMS optical switch to determine a dynamical model containing electrical, mechanical, and optical components. The model is compared to experimental results and shows a good match, aside from the damping term which is difficult to analyze. Improved parameters are determined by system identification from the actual experimental data. The improved model is used to design a controller that has two parts, a feedforward part and a feedback part. The feedforward portion, not normalized in MEMS control, is shown to be instrumental in obtaining fast optical switching with minimal overshoot.",

keywords = "Control, Electrostatic actuator, MEMS, Modeling, Optical switch",

author = "B. Borovic and C. Hong and Liu, {A. Q.} and L. Xie and Lewis, {F. L.}",

year = "2004",

month = dec,

doi = "10.1109/cdc.2004.1428930",

language = "English",

volume = "3",

pages = "3039--3044",

journal = "Proceedings of the IEEE Conference on Decision and Control",

issn = "0743-1546",

publisher = "IEEE",

note = "2004 43rd IEEE Conference on Decision and Control (CDC) ; Conference date: 14-12-2004 Through 17-12-2004",

}

TY - JOUR

T1 - Control of a MEMS optical switch

AU - Borovic, B.

AU - Hong, C.

AU - Liu, A. Q.

AU - Xie, L.

AU - Lewis, F. L.

PY - 2004/12

Y1 - 2004/12

N2 - An analysis is performed of a MEMS optical switch to determine a dynamical model containing electrical, mechanical, and optical components. The model is compared to experimental results and shows a good match, aside from the damping term which is difficult to analyze. Improved parameters are determined by system identification from the actual experimental data. The improved model is used to design a controller that has two parts, a feedforward part and a feedback part. The feedforward portion, not normalized in MEMS control, is shown to be instrumental in obtaining fast optical switching with minimal overshoot.

AB - An analysis is performed of a MEMS optical switch to determine a dynamical model containing electrical, mechanical, and optical components. The model is compared to experimental results and shows a good match, aside from the damping term which is difficult to analyze. Improved parameters are determined by system identification from the actual experimental data. The improved model is used to design a controller that has two parts, a feedforward part and a feedback part. The feedforward portion, not normalized in MEMS control, is shown to be instrumental in obtaining fast optical switching with minimal overshoot.

KW - Control

KW - Electrostatic actuator

KW - MEMS

KW - Modeling

KW - Optical switch

UR - http://www.scopus.com/inward/record.url?scp=14244251063&partnerID=8YFLogxK

U2 - 10.1109/cdc.2004.1428930

DO - 10.1109/cdc.2004.1428930

M3 - Conference article

AN - SCOPUS:14244251063

SN - 0743-1546

VL - 3

SP - 3039

EP - 3044

JO - Proceedings of the IEEE Conference on Decision and Control

JF - Proceedings of the IEEE Conference on Decision and Control

M1 - ThA09.2

T2 - 2004 43rd IEEE Conference on Decision and Control (CDC)

Y2 - 14 December 2004 through 17 December 2004

ER -

Control of a MEMS optical switch

Abstract

Keywords

ASJC Scopus subject areas

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