TY - GEN
T1 - Conceptual design and kinematic analysis of a compliant parallel mechanism for micro/nano scale manipulation
AU - Zhang, Dan
AU - Li, Beizhi
AU - Yang, Jianguo
AU - Gao, Zhen
PY - 2010
Y1 - 2010
N2 - There is a great need in various fields to be able to produce motion on a micro/nano scale with three translational degrees of freedom (DOF). Such fields include optical alignment, cell injection operation, precision manufacturing and micro electro mechanical systems. This research is concerned with the design and analysis of a compliant parallel micromanipulator (CPM) for micro/nano scale manipulation. Several kinematic structures including a novel three-cylindrical-prismatic-revolute CPM is proposed. Based on the established pseudo-rigid-body model of the CPM, the kinematic models are derived. The CPM is featured by pizeo-driven and flexure hinges, thus it has advantages such as sub nanometer resolution, large force generation, sub-millisecond response, and extremely low steady state power consumption.
AB - There is a great need in various fields to be able to produce motion on a micro/nano scale with three translational degrees of freedom (DOF). Such fields include optical alignment, cell injection operation, precision manufacturing and micro electro mechanical systems. This research is concerned with the design and analysis of a compliant parallel micromanipulator (CPM) for micro/nano scale manipulation. Several kinematic structures including a novel three-cylindrical-prismatic-revolute CPM is proposed. Based on the established pseudo-rigid-body model of the CPM, the kinematic models are derived. The CPM is featured by pizeo-driven and flexure hinges, thus it has advantages such as sub nanometer resolution, large force generation, sub-millisecond response, and extremely low steady state power consumption.
UR - http://www.scopus.com/inward/record.url?scp=77954303099&partnerID=8YFLogxK
U2 - 10.1115/IMECE2009-10099
DO - 10.1115/IMECE2009-10099
M3 - Conference article published in proceeding or book
AN - SCOPUS:77954303099
SN - 9780791843833
T3 - ASME International Mechanical Engineering Congress and Exposition, Proceedings
SP - 7
EP - 15
BT - Proceedings of the ASME International Mechanical Engineering Congress and Exposition 2009, IMECE 2009
PB - American Society of Mechanical Engineers(ASME)
T2 - ASME 2009 International Mechanical Engineering Congress and Exposition, IMECE2009
Y2 - 13 November 2009 through 19 November 2009
ER -