Comprehensive study of ZnO films prepared by filtered cathodic vacuum arc at room temperature

Y. G. Wang; Shu Ping Lau; H. W. Lee; Siu Fung Yu; B. K. Tay; X. H. Zhang; K. Y. Tse; H. H. Hng

doi:10.1063/1.1592007

Comprehensive study of ZnO films prepared by filtered cathodic vacuum arc at room temperature

Y. G. Wang, Shu Ping Lau, H. W. Lee, Siu Fung Yu, B. K. Tay, X. H. Zhang, K. Y. Tse, H. H. Hng

Research output: Journal article publication › Journal article › Academic research › peer-review

230 Citations (Scopus)

Abstract

High transparency low resistivity ZnO films were grown on silicon and quartz glass. The high carrier concentration in the films was attributed to zinc interstitials. The photoluminescence (PL) peak position shifted towards lower energy with an increase of the oxygen pressure. High energy ions improved the mobility of growth species on the film surface and led to the deposition of ZnO films.

Original language	English
Pages (from-to)	1597-1604
Number of pages	8
Journal	Journal of Applied Physics
Volume	94
Issue number	3
DOIs	https://doi.org/10.1063/1.1592007
Publication status	Published - 1 Aug 2003
Externally published	Yes

ASJC Scopus subject areas

General Physics and Astronomy

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10.1063/1.1592007

Cite this

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abstract = "High transparency low resistivity ZnO films were grown on silicon and quartz glass. The high carrier concentration in the films was attributed to zinc interstitials. The photoluminescence (PL) peak position shifted towards lower energy with an increase of the oxygen pressure. High energy ions improved the mobility of growth species on the film surface and led to the deposition of ZnO films.",

author = "Wang, {Y. G.} and Lau, {Shu Ping} and Lee, {H. W.} and Yu, {Siu Fung} and Tay, {B. K.} and Zhang, {X. H.} and Tse, {K. Y.} and Hng, {H. H.}",

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AU - Tse, K. Y.

AU - Hng, H. H.

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Comprehensive study of ZnO films prepared by filtered cathodic vacuum arc at room temperature

Abstract

ASJC Scopus subject areas

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