Compositional analysis of GaAs/AlGaAs heterostructures using quantitative scanning transmission electron microscopy

H. Kauko, C. L. Zheng, Ye Zhu, S. Glanvill, C. Dwyer, A. M. Munshi, B. O. Fimland, A. T.J. Van Helvoort, J. Etheridge

Research output: Journal article publicationJournal articleAcademic researchpeer-review

15 Citations (Scopus)


We demonstrate a method for compositional mapping of AlxGa1-xAs heterostructures with high accuracy and unit cell spatial resolution using quantitative high angle annular dark field scanning transmission electron microscopy. The method is low dose relative to spectroscopic methods and insensitive to the effective source size and higher order lens aberrations. We apply the method to study the spatial variation in Al concentration in cross-sectioned GaAs/AlGaAs core-shell nanowires and quantify the concentration in the Al-rich radial band and the AlGaAs shell segments.
Original languageEnglish
Article number232111
JournalApplied Physics Letters
Issue number23
Publication statusPublished - 2 Dec 2013
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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