Keyphrases
Microstructure Evolution
100%
Four-step
100%
Deposition Process
100%
Cubic BN
100%
Ion-assisted Deposition
100%
Buffer Layer
80%
Microstructure
30%
Film Growth
30%
High-resolution Transmission Electron Microscopy (HRTEM)
30%
Preferred Orientation
30%
BN Layer
30%
Ion Energy
20%
Growth Direction
20%
Layer Deposition
20%
Film Stress
10%
High-resolution Electron Energy Loss Spectroscopy (HREELS)
10%
Material Analysis
10%
Nitrided Layer
10%
In Films
10%
Direct Detection
10%
Abrupt Change
10%
C-axis
10%
Boron Nitride Film
10%
Processing Parameters
10%
Multiple Phases
10%
Amorphous Structure
10%
Basal Plane
10%
Complex Microstructure
10%
Electron Diffraction
10%
Small Grains
10%
BabA
10%
Curved Microstructures
10%
Stress Engineering
10%
Crystalline Domain
10%
Cubic Boron Nitride (c-BN)
10%
Material Science
Buffer Layer
100%
Ion Beam Assisted Deposition
100%
Film
50%
Film Growth
37%
High-Resolution Transmission Electron Microscopy
37%
Electron Energy Loss Spectrometry
12%
Electron Diffraction
12%
Cubic Boron Nitride
12%
Boron Nitride
12%
Amorphous Material
12%