Abstract
Complete mechanical measurements are performed in submicron films using the picosecond ultrasonic technique. The Al layer deposited on the top of the sample acting as a transducer is replaced with a nanostructured Al film. Using an usual picosecond ultrasonic setup we can excite and detect high-frequency longitudinal and surface acoustic waves. From this we can deduce Young's modulus and Poisson's ratio of any isotropic thin film. Experimental results obtained for a thin silica layer on silicon are in very good agreement with literature.
Original language | English |
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Article number | 071909 |
Journal | Applied Physics Letters |
Volume | 93 |
Issue number | 7 |
DOIs | |
Publication status | Published - 1 Sept 2008 |
Externally published | Yes |
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)