Comparison between picosecond ultrasonics and nanoindentation characterization in thin film

P. A. Mante, A. Devos, G. Raymond, P. Morin, P. Ancey

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

2 Citations (Scopus)

Abstract

Picosecond ultrasonics is an ultrafast time-resolved technique which offers an unique way of measuring elastic properties in thin films and multi-layers. In the conventional setup only longitudinal waves can be excited by the laser. But in order to have a complete characterization, we need in-plane informations. Here, we show that using a nanostructured aluminum film as a transducer, we can excite longitudinal and high-frequency surface waves using a standard setup. By measuring longitudinal and surface velocities, we can deduce the Young Modulus and the Poisson Ratio which complete the characterization of any isotropic materials. Here we applied this technique and nano-indentation to three SiO2 films with different thicknesses. The idea is to compare the size reduction effect between this two techniques.

Original languageEnglish
Title of host publication2009 IEEE International Ultrasonics Symposium and Short Courses, IUS 2009
DOIs
Publication statusPublished - 1 Dec 2009
Externally publishedYes
Event2009 IEEE International Ultrasonics Symposium, IUS 2009 - Rome, Italy
Duration: 20 Sep 200923 Sep 2009

Publication series

NameProceedings - IEEE Ultrasonics Symposium
ISSN (Print)1051-0117

Conference

Conference2009 IEEE International Ultrasonics Symposium, IUS 2009
CountryItaly
CityRome
Period20/09/0923/09/09

Keywords

  • Nano-indentation
  • Poisson ratio
  • Surface acoustic waves
  • Thin films
  • Ultrasonics
  • Young's modulus

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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