Comparative analysis of a 2-dof micro-stage with two different types of hinges based on level amplified principle

Zhigang Wu; Yangmin Li; Xinhua Zhao

doi:10.1109/ICAL.2012.6308243

Comparative analysis of a 2-dof micro-stage with two different types of hinges based on level amplified principle

Zhigang Wu, Yangmin Li, Xinhua Zhao

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

10 Citations (Scopus)

Abstract

The micro-stage is paid more and more attentions in the field of the micro/nano manipulation and assembly, which can be found applications in the precision manipulating, precision positioning, and biomedical areas. Flexure hinges have more advantages than conventional hinges with advantages of no friction, no backlash, high precision and high stiffness. In this paper, design and analysis of the two degrees of freedom flexure-hinges based micro-stage are performed. The lever amplified principle is used, which has a lot of superiorities for applying to the micro-stage through amplifying the displacement of the piezoelectric actuator (PZT) to obtain a lager output displacement at the stage's end-effector. The ANSYS software version 10.0 is exploited to analyze the displacement and natural frequency.

Original language	English
Title of host publication	2012 IEEE International Conference on Automation and Logistics, ICAL 2012
Pages	405-410
Number of pages	6
DOIs	https://doi.org/10.1109/ICAL.2012.6308243
Publication status	Published - 1 Nov 2012
Externally published	Yes
Event	2012 IEEE International Conference on Automation and Logistics, ICAL 2012 - Zhengzhou, China Duration: 15 Aug 2012 → 17 Aug 2012

Conference

Conference	2012 IEEE International Conference on Automation and Logistics, ICAL 2012
Country/Territory	China
City	Zhengzhou
Period	15/08/12 → 17/08/12

Keywords

finite-element analysis
flexure hinges
micro-stage

ASJC Scopus subject areas

Control and Systems Engineering

More information

10.1109/ICAL.2012.6308243

Cite this

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abstract = "The micro-stage is paid more and more attentions in the field of the micro/nano manipulation and assembly, which can be found applications in the precision manipulating, precision positioning, and biomedical areas. Flexure hinges have more advantages than conventional hinges with advantages of no friction, no backlash, high precision and high stiffness. In this paper, design and analysis of the two degrees of freedom flexure-hinges based micro-stage are performed. The lever amplified principle is used, which has a lot of superiorities for applying to the micro-stage through amplifying the displacement of the piezoelectric actuator (PZT) to obtain a lager output displacement at the stage's end-effector. The ANSYS software version 10.0 is exploited to analyze the displacement and natural frequency.",

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Wu, Z, Li, Y & Zhao, X 2012, Comparative analysis of a 2-dof micro-stage with two different types of hinges based on level amplified principle. in 2012 IEEE International Conference on Automation and Logistics, ICAL 2012., 6308243, pp. 405-410, 2012 IEEE International Conference on Automation and Logistics, ICAL 2012, Zhengzhou, China, 15/08/12. https://doi.org/10.1109/ICAL.2012.6308243

Comparative analysis of a 2-dof micro-stage with two different types of hinges based on level amplified principle. / Wu, Zhigang; Li, Yangmin; Zhao, Xinhua.
2012 IEEE International Conference on Automation and Logistics, ICAL 2012. 2012. p. 405-410 6308243.

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

TY - GEN

T1 - Comparative analysis of a 2-dof micro-stage with two different types of hinges based on level amplified principle

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AB - The micro-stage is paid more and more attentions in the field of the micro/nano manipulation and assembly, which can be found applications in the precision manipulating, precision positioning, and biomedical areas. Flexure hinges have more advantages than conventional hinges with advantages of no friction, no backlash, high precision and high stiffness. In this paper, design and analysis of the two degrees of freedom flexure-hinges based micro-stage are performed. The lever amplified principle is used, which has a lot of superiorities for applying to the micro-stage through amplifying the displacement of the piezoelectric actuator (PZT) to obtain a lager output displacement at the stage's end-effector. The ANSYS software version 10.0 is exploited to analyze the displacement and natural frequency.

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Comparative analysis of a 2-dof micro-stage with two different types of hinges based on level amplified principle

Abstract

Conference

Keywords

ASJC Scopus subject areas

More information

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