Abstract
The micro-stage is paid more and more attentions in the field of the micro/nano manipulation and assembly, which can be found applications in the precision manipulating, precision positioning, and biomedical areas. Flexure hinges have more advantages than conventional hinges with advantages of no friction, no backlash, high precision and high stiffness. In this paper, design and analysis of the two degrees of freedom flexure-hinges based micro-stage are performed. The lever amplified principle is used, which has a lot of superiorities for applying to the micro-stage through amplifying the displacement of the piezoelectric actuator (PZT) to obtain a lager output displacement at the stage's end-effector. The ANSYS software version 10.0 is exploited to analyze the displacement and natural frequency.
Original language | English |
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Title of host publication | 2012 IEEE International Conference on Automation and Logistics, ICAL 2012 |
Pages | 405-410 |
Number of pages | 6 |
DOIs | |
Publication status | Published - 1 Nov 2012 |
Externally published | Yes |
Event | 2012 IEEE International Conference on Automation and Logistics, ICAL 2012 - Zhengzhou, China Duration: 15 Aug 2012 → 17 Aug 2012 |
Conference
Conference | 2012 IEEE International Conference on Automation and Logistics, ICAL 2012 |
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Country/Territory | China |
City | Zhengzhou |
Period | 15/08/12 → 17/08/12 |
Keywords
- finite-element analysis
- flexure hinges
- micro-stage
ASJC Scopus subject areas
- Control and Systems Engineering