Common path scanning heterodyne optical profilometer for absolute phase measurement

M. J. Offside; Michael Geoffrey Somekh; C. W. See

doi:10.1063/1.102102

Common path scanning heterodyne optical profilometer for absolute phase measurement

M. J. Offside, Michael Geoffrey Somekh, C. W. See

Research output: Journal article publication › Journal article › Academic research › peer-review

1 Citation (Scopus)

Abstract

A scanning optical profilometer is described which overcomes some of the limitations of existing interferometric profilometers. Two laser beams are incident on the sample ensuring common path operation. One beam forms a tightly focused sample probe spot and the other remains collimated, acting as a large-area, common path reference beam. Our configuration allows the relative size of the two beams to be varied both arbitrarily and independently, thus guaranteeing an accurate absolute phase measurement. Preliminary results demonstrating the operation of the system are presented.

Original language	English
Pages (from-to)	2051-2053
Number of pages	3
Journal	Applied Physics Letters
Volume	55
Issue number	20
DOIs	https://doi.org/10.1063/1.102102
Publication status	Published - 1 Dec 1989
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.102102

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Common path scanning heterodyne optical profilometer for absolute phase measurement

Abstract

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