Common path scanning heterodyne optical profilometer for absolute phase measurement

M. J. Offside, Michael Geoffrey Somekh, C. W. See

Research output: Journal article publicationJournal articleAcademic researchpeer-review

7 Citations (Scopus)


A scanning optical profilometer is described which overcomes some of the limitations of existing interferometric profilometers. Two laser beams are incident on the sample ensuring common path operation. One beam forms a tightly focused sample probe spot and the other remains collimated, acting as a large-area, common path reference beam. Our configuration allows the relative size of the two beams to be varied both arbitrarily and independently, thus guaranteeing an accurate absolute phase measurement. Preliminary results demonstrating the operation of the system are presented.
Original languageEnglish
Pages (from-to)2051-2053
Number of pages3
JournalApplied Physics Letters
Issue number20
Publication statusPublished - 1 Dec 1989
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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