Common path interferometric microellipsometry

Yueai Liu, Chung W. See, Michael Geoffrey Somekh

Research output: Journal article publicationConference articleAcademic researchpeer-review

2 Citations (Scopus)


Common path interferometric microellipsometry based on the Young's interference principle is presented. Interference of the pure p and s reflections at the back focal plane of a microscopic objective takes place by means of Young's interferometry. Therefore, the amplitude ratio, tan (psi) , and the phase different, (Delta) , of the two polarization components are represented as the contrast and the phase shift of the Young's fringe pattern. Hence, the complex refractive index of the sample can be calculated using well- known equations. This technique is particularly applicable in pure topography where the measured optical phase is actually a contribution of both the surface height change and material change as well.
Original languageEnglish
Pages (from-to)635-645
Number of pages11
JournalProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - 1 Dec 2004
Externally publishedYes
EventOptical Inspection and Micromeasurements - Besancon, France
Duration: 10 Jun 199610 Jun 1996

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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