Common path interferometric microellipsometry

Yueai Liu; Chung W. See; Michael Geoffrey Somekh

doi:10.1117/12.250794

Common path interferometric microellipsometry

Yueai Liu, Chung W. See, Michael Geoffrey Somekh

Research output: Journal article publication › Conference article › Academic research › peer-review

3 Citations (Scopus)

Abstract

Common path interferometric microellipsometry based on the Young's interference principle is presented. Interference of the pure p and s reflections at the back focal plane of a microscopic objective takes place by means of Young's interferometry. Therefore, the amplitude ratio, tan (psi) , and the phase different, (Delta) , of the two polarization components are represented as the contrast and the phase shift of the Young's fringe pattern. Hence, the complex refractive index of the sample can be calculated using well- known equations. This technique is particularly applicable in pure topography where the measured optical phase is actually a contribution of both the surface height change and material change as well.

Original language	English
Pages (from-to)	635-645
Number of pages	11
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	2782
DOIs	https://doi.org/10.1117/12.250794
Publication status	Published - 1 Dec 2004
Externally published	Yes
Event	Optical Inspection and Micromeasurements - Besancon, France Duration: 10 Jun 1996 → 10 Jun 1996

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.250794

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AU - See, Chung W.

AU - Somekh, Michael Geoffrey

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AB - Common path interferometric microellipsometry based on the Young's interference principle is presented. Interference of the pure p and s reflections at the back focal plane of a microscopic objective takes place by means of Young's interferometry. Therefore, the amplitude ratio, tan (psi) , and the phase different, (Delta) , of the two polarization components are represented as the contrast and the phase shift of the Young's fringe pattern. Hence, the complex refractive index of the sample can be calculated using well- known equations. This technique is particularly applicable in pure topography where the measured optical phase is actually a contribution of both the surface height change and material change as well.

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M3 - Conference article

SN - 0277-786X

VL - 2782

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EP - 645

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Optical Inspection and Micromeasurements

Y2 - 10 June 1996 through 10 June 1996

ER -

Common path interferometric microellipsometry

Abstract

ASJC Scopus subject areas

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