Common path differential intensity and phase profilometer using time division multiplexing

M. S. Valera; Michael Geoffrey Somekh; R. K. Appel

doi:10.1049/el:19910447

Common path differential intensity and phase profilometer using time division multiplexing

M. S. Valera, Michael Geoffrey Somekh, R. K. Appel

Research output: Journal article publication › Journal article › Academic research › peer-review

8 Citations (Scopus)

Abstract

A new approach to obtain simultaneous differential phase and intensity scans from an optical profilometer/microscope is described. The proposed configuration achieves these objectives by multiplexing two interferometers in time. Optimum differential intensity and phase response are achieved without the compromise associated with previous systems.

Original language	English
Pages (from-to)	719-720
Number of pages	2
Journal	Electronics Letters
Volume	27
Issue number	9
DOIs	https://doi.org/10.1049/el:19910447
Publication status	Published - 25 Apr 1991
Externally published	Yes

Keywords

Differential analysers
Interferometers
Phase
Profiles

ASJC Scopus subject areas

Electrical and Electronic Engineering

More information

10.1049/el:19910447

Cite this

@article{397d06ded9ce4669baa5df5ad5d460fe,

title = "Common path differential intensity and phase profilometer using time division multiplexing",

abstract = "A new approach to obtain simultaneous differential phase and intensity scans from an optical profilometer/microscope is described. The proposed configuration achieves these objectives by multiplexing two interferometers in time. Optimum differential intensity and phase response are achieved without the compromise associated with previous systems.",

keywords = "Differential analysers, Interferometers, Phase, Profiles",

author = "Valera, \{M. S.\} and Somekh, \{Michael Geoffrey\} and Appel, \{R. K.\}",

year = "1991",

month = apr,

day = "25",

doi = "10.1049/el:19910447",

language = "English",

volume = "27",

pages = "719--720",

journal = "Electronics Letters",

issn = "0013-5194",

publisher = "John Wiley \& Sons Inc.",

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TY - JOUR

T1 - Common path differential intensity and phase profilometer using time division multiplexing

AU - Valera, M. S.

AU - Somekh, Michael Geoffrey

AU - Appel, R. K.

PY - 1991/4/25

Y1 - 1991/4/25

N2 - A new approach to obtain simultaneous differential phase and intensity scans from an optical profilometer/microscope is described. The proposed configuration achieves these objectives by multiplexing two interferometers in time. Optimum differential intensity and phase response are achieved without the compromise associated with previous systems.

AB - A new approach to obtain simultaneous differential phase and intensity scans from an optical profilometer/microscope is described. The proposed configuration achieves these objectives by multiplexing two interferometers in time. Optimum differential intensity and phase response are achieved without the compromise associated with previous systems.

KW - Differential analysers

KW - Interferometers

KW - Phase

KW - Profiles

UR - https://www.scopus.com/pages/publications/0026135752

U2 - 10.1049/el:19910447

DO - 10.1049/el:19910447

M3 - Journal article

SN - 0013-5194

VL - 27

SP - 719

EP - 720

JO - Electronics Letters

JF - Electronics Letters

IS - 9

ER -

Common path differential intensity and phase profilometer using time division multiplexing

Abstract

Keywords

ASJC Scopus subject areas

More information

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