Common path differential intensity and phase profilometer using time division multiplexing

M. S. Valera, Michael Geoffrey Somekh, R. K. Appel

Research output: Journal article publicationJournal articleAcademic researchpeer-review

8 Citations (Scopus)

Abstract

A new approach to obtain simultaneous differential phase and intensity scans from an optical profilometer/microscope is described. The proposed configuration achieves these objectives by multiplexing two interferometers in time. Optimum differential intensity and phase response are achieved without the compromise associated with previous systems.
Original languageEnglish
Pages (from-to)719-720
Number of pages2
JournalElectronics Letters
Volume27
Issue number9
DOIs
Publication statusPublished - 25 Apr 1991
Externally publishedYes

Keywords

  • Differential analysers
  • Interferometers
  • Phase
  • Profiles

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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