CO2Gas Sensing by Cmos-Mems Scaln-Based Pyroelectric Detector Based on MID-IR Absorption

Doris K.T. Ng; Chong Pei Ha; Linfang Xu; Weiguo Chen; Yuan Hsing Fu; Tantan Zhang; Li Yan Siow; Norhanani Jaafar; Eldwin J. Ng; Yuan Gao; Hong Cai; Qingxin Zhang; Lennon Y.T. Lee

doi:10.1109/Transducers50396.2021.9495707

CO2Gas Sensing by Cmos-Mems Scaln-Based Pyroelectric Detector Based on MID-IR Absorption

Doris K.T. Ng, Chong Pei Ha, Linfang Xu, Weiguo Chen, Yuan Hsing Fu, Tantan Zhang, Li Yan Siow, Norhanani Jaafar, Eldwin J. Ng, Yuan Gao, Hong Cai, Qingxin Zhang, Lennon Y.T. Lee

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

5 Citations (Scopus)

Abstract

CO2 gas sensing responses are measured using our in-house fabricated CMOS-MEMS ScAlN-based pyroelectric detector with 12% Sc doped concentration. Leveraging on mid-IR absorption behavior of CO2 gas caused by interaction of CO2 with light at 4.26 m wavelength, our ScAlN-based pyroelectric detector successfully detect CO2 gas response ranging from CO2 concentrations of 5000 ppm down to 200 ppm. Gas channel lengths are varied from 6 cm to 10 cm and their respective CO2 responses are measured. Finally, with N2 as the reference gas, we calculate the gas response percentage change of CO2 gas at different gas channel lengths and concentration.

Original language	English
Title of host publication	21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	827-830
Number of pages	4
ISBN (Electronic)	9781665412674
DOIs	https://doi.org/10.1109/Transducers50396.2021.9495707
Publication status	Published - 20 Jun 2021
Externally published	Yes
Event	21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 - Virtual, Online, United States Duration: 20 Jun 2021 → 25 Jun 2021

Publication series

Name	21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021

Conference

Conference	21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
Country/Territory	United States
City	Virtual, Online
Period	20/06/21 → 25/06/21

Keywords

carbon dioxide gas sensor
CMOS-MEMS
Infrared Detector
ScAlN pyroelectric detector
uncooled

ASJC Scopus subject areas

Electrical and Electronic Engineering
Mechanical Engineering
Control and Optimization
Instrumentation

More information

10.1109/Transducers50396.2021.9495707

Cite this

Ng, D. K. T., Ha, C. P., Xu, L., Chen, W., Fu, Y. H., Zhang, T., Siow, L. Y., Jaafar, N., Ng, E. J., Gao, Y., Cai, H., Zhang, Q., & Lee, L. Y. T. (2021). CO2Gas Sensing by Cmos-Mems Scaln-Based Pyroelectric Detector Based on MID-IR Absorption. In 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 (pp. 827-830). (21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/Transducers50396.2021.9495707

Ng, Doris K.T. ; Ha, Chong Pei ; Xu, Linfang et al. / CO2Gas Sensing by Cmos-Mems Scaln-Based Pyroelectric Detector Based on MID-IR Absorption. 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021. Institute of Electrical and Electronics Engineers Inc., 2021. pp. 827-830 (21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021).

@inproceedings{15441f8b3ccc4a82ac4d254ecc2e54e2,

title = "CO2Gas Sensing by Cmos-Mems Scaln-Based Pyroelectric Detector Based on MID-IR Absorption",

abstract = "CO2 gas sensing responses are measured using our in-house fabricated CMOS-MEMS ScAlN-based pyroelectric detector with 12% Sc doped concentration. Leveraging on mid-IR absorption behavior of CO2 gas caused by interaction of CO2 with light at 4.26 m wavelength, our ScAlN-based pyroelectric detector successfully detect CO2 gas response ranging from CO2 concentrations of 5000 ppm down to 200 ppm. Gas channel lengths are varied from 6 cm to 10 cm and their respective CO2 responses are measured. Finally, with N2 as the reference gas, we calculate the gas response percentage change of CO2 gas at different gas channel lengths and concentration.",

keywords = "carbon dioxide gas sensor, CMOS-MEMS, Infrared Detector, ScAlN pyroelectric detector, uncooled",

author = "Ng, {Doris K.T.} and Ha, {Chong Pei} and Linfang Xu and Weiguo Chen and Fu, {Yuan Hsing} and Tantan Zhang and Siow, {Li Yan} and Norhanani Jaafar and Ng, {Eldwin J.} and Yuan Gao and Hong Cai and Qingxin Zhang and Lee, {Lennon Y.T.}",

note = "Publisher Copyright: {\textcopyright} 2021 IEEE.; 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 ; Conference date: 20-06-2021 Through 25-06-2021",

year = "2021",

month = jun,

day = "20",

doi = "10.1109/Transducers50396.2021.9495707",

language = "English",

series = "21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "827--830",

booktitle = "21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021",

}

Ng, DKT, Ha, CP, Xu, L, Chen, W, Fu, YH, Zhang, T, Siow, LY, Jaafar, N, Ng, EJ, Gao, Y, Cai, H, Zhang, Q & Lee, LYT 2021, CO2Gas Sensing by Cmos-Mems Scaln-Based Pyroelectric Detector Based on MID-IR Absorption. in 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021. 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021, Institute of Electrical and Electronics Engineers Inc., pp. 827-830, 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021, Virtual, Online, United States, 20/06/21. https://doi.org/10.1109/Transducers50396.2021.9495707

CO2Gas Sensing by Cmos-Mems Scaln-Based Pyroelectric Detector Based on MID-IR Absorption. / Ng, Doris K.T.; Ha, Chong Pei; Xu, Linfang et al.
21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021. Institute of Electrical and Electronics Engineers Inc., 2021. p. 827-830 (21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021).

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

TY - GEN

T1 - CO2Gas Sensing by Cmos-Mems Scaln-Based Pyroelectric Detector Based on MID-IR Absorption

AU - Ng, Doris K.T.

AU - Ha, Chong Pei

AU - Xu, Linfang

AU - Chen, Weiguo

AU - Fu, Yuan Hsing

AU - Zhang, Tantan

AU - Siow, Li Yan

AU - Jaafar, Norhanani

AU - Ng, Eldwin J.

AU - Gao, Yuan

AU - Cai, Hong

AU - Zhang, Qingxin

AU - Lee, Lennon Y.T.

PY - 2021/6/20

Y1 - 2021/6/20

N2 - CO2 gas sensing responses are measured using our in-house fabricated CMOS-MEMS ScAlN-based pyroelectric detector with 12% Sc doped concentration. Leveraging on mid-IR absorption behavior of CO2 gas caused by interaction of CO2 with light at 4.26 m wavelength, our ScAlN-based pyroelectric detector successfully detect CO2 gas response ranging from CO2 concentrations of 5000 ppm down to 200 ppm. Gas channel lengths are varied from 6 cm to 10 cm and their respective CO2 responses are measured. Finally, with N2 as the reference gas, we calculate the gas response percentage change of CO2 gas at different gas channel lengths and concentration.

AB - CO2 gas sensing responses are measured using our in-house fabricated CMOS-MEMS ScAlN-based pyroelectric detector with 12% Sc doped concentration. Leveraging on mid-IR absorption behavior of CO2 gas caused by interaction of CO2 with light at 4.26 m wavelength, our ScAlN-based pyroelectric detector successfully detect CO2 gas response ranging from CO2 concentrations of 5000 ppm down to 200 ppm. Gas channel lengths are varied from 6 cm to 10 cm and their respective CO2 responses are measured. Finally, with N2 as the reference gas, we calculate the gas response percentage change of CO2 gas at different gas channel lengths and concentration.

KW - carbon dioxide gas sensor

KW - CMOS-MEMS

KW - Infrared Detector

KW - ScAlN pyroelectric detector

KW - uncooled

UR - http://www.scopus.com/inward/record.url?scp=85114960570&partnerID=8YFLogxK

U2 - 10.1109/Transducers50396.2021.9495707

DO - 10.1109/Transducers50396.2021.9495707

M3 - Conference article published in proceeding or book

AN - SCOPUS:85114960570

T3 - 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021

SP - 827

EP - 830

BT - 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021

Y2 - 20 June 2021 through 25 June 2021

ER -

Ng DKT, Ha CP, Xu L, Chen W, Fu YH, Zhang T et al. CO2Gas Sensing by Cmos-Mems Scaln-Based Pyroelectric Detector Based on MID-IR Absorption. In 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021. Institute of Electrical and Electronics Engineers Inc. 2021. p. 827-830. (21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021). doi: 10.1109/Transducers50396.2021.9495707

CO2Gas Sensing by Cmos-Mems Scaln-Based Pyroelectric Detector Based on MID-IR Absorption

Abstract

Publication series

Conference

Keywords

ASJC Scopus subject areas

More information

Other files and links

Fingerprint

Cite this