CMOS photonics for optical manipulation of particles and biosensing

Andrew W. Poon, Hong Cai

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

1 Citation (Scopus)

Abstract

We will discuss the latest progress in our work on using complementary metal-oxide semiconductor (CMOS) photonics for optical manipulation of dielectric microparticles and submicrometer particles in a microfluidic channel. Specifically, we will review optical trapping and routing of particles using silicon nitride waveguide-based directional couplers and multimode-interference (MMI)-based couplers. Our experiments reveal that microparticles can be directionally coupled from one waveguide to another waveguide via evanescent light coupling over submicrometer gap spacing. We also observe that microparticles can be preferentially transported to the larger field-intensity output-port of a 1×2 MMI optical power splitter. We thus envision that these photonic components, along with other photonic components that have previously been demonstrated with functionalities of optical manipulation of particles in fluids, constitute basic building blocks of CMOS optofluidic "particle circuits" for particle manipulation and biosensing.

Original languageEnglish
Title of host publicationSilicon Photonics and Photonic Integrated Circuits III
DOIs
Publication statusPublished - Apr 2012
Externally publishedYes
EventSilicon Photonics and Photonic Integrated Circuits III - Brussels, Belgium
Duration: 16 Apr 201219 Apr 2012

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8431
ISSN (Print)0277-786X

Conference

ConferenceSilicon Photonics and Photonic Integrated Circuits III
Country/TerritoryBelgium
CityBrussels
Period16/04/1219/04/12

Keywords

  • CMOS photonics
  • Optical manipulation
  • Optofluidics
  • Particle couplers
  • Particle splitters
  • Surface wave

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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