@inproceedings{48f8de4fb3d441ef9c16d9f6365b70c6,
title = "Cmos-Mems SC0.12AL0.88N-Based Pyroelectric Infared Detector with CO Gas Sensing",
abstract = "Pyroelectric IR detector is fabricated using ScAlN with 12\% doped Sc as the pyroelectric sensing material. Dielectric layers that act as absorber are added on top of the ScAlN to help in IR absorption. This ScAlN-based pyroelectric detector is characterized by illumination from a MEMS thermal emitter with a sinusoidal input waveform. D∗ is measured to be as high as 1.87 x 10 (cm√Hz)/W at a frequency of 13 Hz. The optical absorptance of this device at 4.26 μm CO gas absorption wavelength is around 0.75, measured using FTIR. CO gas sensing measurement detects electrical signal changes of 50-100 μV.",
keywords = "CMOS-MEMS, CO gas sensing, infrared detector, ScAlN pyroelectric detector",
author = "Ng, \{Doris K.T.\} and Ho, \{Chong Pei\} and Linfang Xu and Tantan Zhang and Siow, \{Li Yan\} and Ng, \{Eldwin J.\} and Hong Cai and Qingxin Zhang and Lee, \{Lennon Y.T.\}",
note = "Publisher Copyright: {\textcopyright} 2021 IEEE.; 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021 ; Conference date: 25-01-2021 Through 29-01-2021",
year = "2021",
month = jan,
day = "25",
doi = "10.1109/MEMS51782.2021.9375435",
language = "English",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "852--855",
booktitle = "34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021",
}