Cmos-Mems SC0.12AL0.88N-Based Pyroelectric Infared Detector with CO Gas Sensing

Doris K.T. Ng, Chong Pei Ho, Linfang Xu, Tantan Zhang, Li Yan Siow, Eldwin J. Ng, Hong Cai, Qingxin Zhang, Lennon Y.T. Lee

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

9 Citations (Scopus)

Abstract

Pyroelectric IR detector is fabricated using ScAlN with 12% doped Sc as the pyroelectric sensing material. Dielectric layers that act as absorber are added on top of the ScAlN to help in IR absorption. This ScAlN-based pyroelectric detector is characterized by illumination from a MEMS thermal emitter with a sinusoidal input waveform. D∗ is measured to be as high as 1.87 x 10 (cm√Hz)/W at a frequency of 13 Hz. The optical absorptance of this device at 4.26 μm CO gas absorption wavelength is around 0.75, measured using FTIR. CO gas sensing measurement detects electrical signal changes of 50-100 μV.

Original languageEnglish
Title of host publication34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages852-855
Number of pages4
ISBN (Electronic)9781665419123
DOIs
Publication statusPublished - 25 Jan 2021
Externally publishedYes
Event34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021 - Virtual, Gainesville, United States
Duration: 25 Jan 202129 Jan 2021

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2021-January
ISSN (Print)1084-6999

Conference

Conference34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021
Country/TerritoryUnited States
CityVirtual, Gainesville
Period25/01/2129/01/21

Keywords

  • CMOS-MEMS
  • CO gas sensing
  • infrared detector
  • ScAlN pyroelectric detector

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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