CMOS-compatible ruggedized high-temperature Lamb wave pressure sensor

Keyphrases

• High Temperature 100%
• CMOS Technology 100%
• Lamb Waves 100%
• Nitrides 100%
• Pressure Sensor 100%
• Wave Pressure 100%
• Ruggedized 100%
• Temperature Sensitivity 50%
• Composite Structures 50%
• Young's Modulus 50%
• Temperature Range 50%
• Phase Noise 50%
• Temperature Effect 50%
• Resonant Frequency 50%
• Pressure Sensitivity 50%
• Nitrided Layer 50%
• Sensor chip 50%
• Device Layer 50%
• At Resonance 50%
• Coupling Coefficient 50%
• Lamb Wave Mode 50%
• Model Coupling 50%
• Harsh Environment 50%
• SOI Wafer 50%
• Comb-like 50%
• Oil Exploration 50%
• Gas Exploration 50%
• Pressure Test 50%
• Aeronautic Applications 50%
• Interdigital Transducer 50%
• Resonant Sensor 50%
• Modified Butterworth-Van Dyke Model 50%
• Temperature Coefficient of Frequency 50%
• High-temperature Pressure Sensor 50%
• Automobile Applications 50%
• Absolute Sensor 50%

Engineering

• Lamb Wave 100%
• Pressure Sensor 100%
• Nitride 50%
• Q Factor 25%
• Electrode Structure 25%
• Temperature Range 25%
• Resonance Frequency 25%
• Phase Noise 25%
• Sensor Chip 25%
• Coupling Coefficient 25%
• Temperature Coefficient 25%
• Nitride Layer 25%
• Test Pressure 25%
• Young's Modulus 25%
• Composite Structure 25%
• Natural Gas Exploration 25%
• Butterworth 25%
• Transducer 25%
• Oil Exploration 25%