CMOS compatible MEMS pyroelectric infrared detectors: From AlN to ScAlN

Doris K.T. Ng, Chong Pei Ho, Tantan Zhang, Linfang Xu, Li Yan Siow, Wing Wai Chung, Hong Cai, Lennon Y.T. Lee, Qingxin Zhang, Navab Singh

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review