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CMOS compatible MEMS pyroelectric infrared detectors: From AlN to ScAlN
- Doris K.T. Ng
- , Chong Pei Ho
- , Tantan Zhang
- , Linfang Xu
- , Li Yan Siow
- , Wing Wai Chung
- , Hong Cai
- , Lennon Y.T. Lee
- , Qingxin Zhang
- , Navab Singh
Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review
12
Citations
(Scopus)