@inproceedings{b27e9d9d0bcf4274b908a8b55f5de5a2,
title = "CMOS compatible MEMS pyroelectric infrared detectors: From AlN to ScAlN",
abstract = "We present the optical and electrical properties of AlN-based and 12\% doped ScAlN-based pyroelectric detectors fabricated on 8-inch wafers respectively. Both AlN and ScAlN materials are deposited at a temperature of ∼200oC, making them potential candidates for CMOS compatible MEMS pyroelectric detectors. FTIR spectroscopy is used to measure the absorption of these pyroelectric detectors over the wavelength range of ∼2-14 μm and the results show absorption improvement up to ∼75\% for ScAlN-based pyroelectric detectors compared to that of AlN-based pyroelectric detectors at the wavelength of 4.26 μm where CO gas absorption of IR radiation is anticipated. Higher output current (∼3-fold increase) is also observed from ScAlN-based pyroelectric detectors. Other than pyroelectric coefficient that contributes to improved performance for ScAlN-based pyroelectric detectors, we believe that absorptivity of the device also plays a major role in the performance of pyroelectric IR detectors. The results obtained from the study of the electrical and optical properties of AlN-based and ScAlN-based CMOS compatible MEMS pyroelectric detectors will bring forth potential applications of these detectors onto multi-functional integrable and monolithic platforms.",
keywords = "aluminum nitride, CMOS compatible, infrared, MEMS, pyroelectric detector, scandium aluminum nitride",
author = "Ng, \{Doris K.T.\} and Ho, \{Chong Pei\} and Tantan Zhang and Linfang Xu and Siow, \{Li Yan\} and Chung, \{Wing Wai\} and Hong Cai and Lee, \{Lennon Y.T.\} and Qingxin Zhang and Navab Singh",
note = "Publisher Copyright: {\textcopyright} 2021 SPIE.; MOEMS and Miniaturized Systems XX 2021 ; Conference date: 06-03-2021 Through 11-03-2021",
year = "2021",
month = mar,
doi = "10.1117/12.2582707",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Hans Zappe and Wibool Piyawattanametha and Yong-Hwa Park",
booktitle = "MOEMS and Miniaturized Systems XX",
address = "United States",
}