CMAC-based PID control of an XY parallel micropositioning stage

Qingsong Xu; Yangmin Li

doi:10.1007/978-3-642-01510-6_118

CMAC-based PID control of an XY parallel micropositioning stage

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

4 Citations (Scopus)

Abstract

This paper presents the controller design of an XY parallel micropositioning stage aiming at a sub-micron accuracy for micro scale manipulation. Owning to the decoupled design of the mechanism, a simple single-input-single-output (SISO) PID controller is adopted for each axis. To compensate for the hysteresis arising from piezoelectric actuator, credit assigned CMAC (cerebellar model articulation controller) neural network with adjustable learning rate is employed into the PID control. Experimental results show that the hysteresis of the stage has been significantly reduced by the CMAC-based PID controller and the stage can achieve a sub-micron positioning accuracy, which demonstrate the effectiveness of the designed controller as well.

Original language	English
Title of host publication	Advances in Neural Networks - ISNN 2009 - 6th International Symposium on Neural Networks, ISNN 2009, Proceedings
Pages	1040-1049
Number of pages	10
Edition	PART 2
DOIs	https://doi.org/10.1007/978-3-642-01510-6_118
Publication status	Published - 10 Sept 2009
Externally published	Yes
Event	6th International Symposium on Neural Networks, ISNN 2009 - Wuhan, China Duration: 26 May 2009 → 29 May 2009

Publication series

Name	Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics)
Number	PART 2
Volume	5552 LNCS
ISSN (Print)	0302-9743
ISSN (Electronic)	1611-3349

Conference

Conference	6th International Symposium on Neural Networks, ISNN 2009
Country/Territory	China
City	Wuhan
Period	26/05/09 → 29/05/09

Keywords

CMAC neural network
Micropositioning
Parallel manipulator

ASJC Scopus subject areas

Computer Science(all)
Theoretical Computer Science

More information

10.1007/978-3-642-01510-6_118

Cite this

Xu, Q., & Li, Y. (2009). CMAC-based PID control of an XY parallel micropositioning stage. In Advances in Neural Networks - ISNN 2009 - 6th International Symposium on Neural Networks, ISNN 2009, Proceedings (PART 2 ed., pp. 1040-1049). (Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics); Vol. 5552 LNCS, No. PART 2). https://doi.org/10.1007/978-3-642-01510-6_118

Xu, Qingsong ; Li, Yangmin. / CMAC-based PID control of an XY parallel micropositioning stage. Advances in Neural Networks - ISNN 2009 - 6th International Symposium on Neural Networks, ISNN 2009, Proceedings. PART 2. ed. 2009. pp. 1040-1049 (Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics); PART 2).

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Xu, Q & Li, Y 2009, CMAC-based PID control of an XY parallel micropositioning stage. in Advances in Neural Networks - ISNN 2009 - 6th International Symposium on Neural Networks, ISNN 2009, Proceedings. PART 2 edn, Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics), no. PART 2, vol. 5552 LNCS, pp. 1040-1049, 6th International Symposium on Neural Networks, ISNN 2009, Wuhan, China, 26/05/09. https://doi.org/10.1007/978-3-642-01510-6_118

CMAC-based PID control of an XY parallel micropositioning stage. / Xu, Qingsong; Li, Yangmin.
Advances in Neural Networks - ISNN 2009 - 6th International Symposium on Neural Networks, ISNN 2009, Proceedings. PART 2. ed. 2009. p. 1040-1049 (Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics); Vol. 5552 LNCS, No. PART 2).

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

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AB - This paper presents the controller design of an XY parallel micropositioning stage aiming at a sub-micron accuracy for micro scale manipulation. Owning to the decoupled design of the mechanism, a simple single-input-single-output (SISO) PID controller is adopted for each axis. To compensate for the hysteresis arising from piezoelectric actuator, credit assigned CMAC (cerebellar model articulation controller) neural network with adjustable learning rate is employed into the PID control. Experimental results show that the hysteresis of the stage has been significantly reduced by the CMAC-based PID controller and the stage can achieve a sub-micron positioning accuracy, which demonstrate the effectiveness of the designed controller as well.

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Xu Q, Li Y. CMAC-based PID control of an XY parallel micropositioning stage. In Advances in Neural Networks - ISNN 2009 - 6th International Symposium on Neural Networks, ISNN 2009, Proceedings. PART 2 ed. 2009. p. 1040-1049. (Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics); PART 2). doi: 10.1007/978-3-642-01510-6_118

CMAC-based PID control of an XY parallel micropositioning stage

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