At room temperature, an off-plane double bend filtered cathodic vacuum arc technique is used to deposit (Ti,Al)N films under a nitrogen atmosphere. The surface morphology of the deposited films is analyzed using SEM and atomic force microscopy. The films are also studied based on their composition and bond structure using XPS.
|Number of pages||6|
|Journal||Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films|
|Publication status||Published - 1 Mar 2001|
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films