Abstract
Films and coatings are integral elements of devices used for a variety of purposes in engineering, electronic, optical and other applications. The performance, functional characteristics, and structural properties of the devices all depend on the adhesion between the film and substrate. Adhesion measurement techniques that are currently available are not comparable from one laboratory to another, nor are there any techniques that are noncontacting, quantitative, and reliable. In our work, surface acoustic waves (SAWs) are used to introduce stresses between the films and their substrates. Regions of the film having weak bonding forces will produce a different response than the regions having strong bonding forces.
Original language | English |
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Title of host publication | Proceedings of SPIE - The International Society for Optical Engineering |
Publisher | SPIE |
Pages | 275-284 |
Number of pages | 10 |
Volume | 768 |
ISBN (Print) | 0892528036 |
Publication status | Published - 1 Dec 1987 |
Externally published | Yes |
Event | International Symposium on Pattern Recognition and Acoustical Imaging. - Newport Beach, CA, United States Duration: 1 Dec 1987 → … |
Conference
Conference | International Symposium on Pattern Recognition and Acoustical Imaging. |
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Country/Territory | United States |
City | Newport Beach, CA |
Period | 1/12/87 → … |
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Condensed Matter Physics