Characterization of thick amorphous carbon films formed by pulse bias filtered cathodic vacuum arc

Nobuto Yasui, Hiroshi Inaba, Hiromu Chiba, Xudong Yang, Shu Ping Lau

Research output: Journal article publicationJournal articleAcademic researchpeer-review

3 Citations (Scopus)

Abstract

To form several-micrometer-thick diamond-like carbon (DLC) films, pulse bias filtered cathodic vacuum arc deposition was performed, In this study, nonhydrogenated DLC films were evaluated using visible and ultraviolet Raman spectroscopy, an electron energy loss spectroscopy (EELS) and a nano indenter. All observations indicated that the sp3 ratio of the DLC films decreases with increasing applied pulse bias. However, a moderately high sp 3 ratio of 42.3% was obtained for 500-nm-thick PLC films with a compressive stress of 3.5 GPa formed at a pulse bias of 500 V, a pulse width of 25 μs, and a frequency of 1500Hz.
Original languageEnglish
Pages (from-to)7854-7859
Number of pages6
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume45
Issue number10 A
DOIs
Publication statusPublished - 15 Oct 2006
Externally publishedYes

Keywords

  • Diamond-like carbon
  • EELS
  • Pulse bias filtered cathodic vacuum arc
  • UV raman

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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