Characterization of thick amorphous carbon films formed by pulse bias filtered cathodic vacuum arc

Nobuto Yasui; Hiroshi Inaba; Hiromu Chiba; Xudong Yang; Shu Ping Lau

doi:10.1143/JJAP.45.7854

Characterization of thick amorphous carbon films formed by pulse bias filtered cathodic vacuum arc

Nobuto Yasui, Hiroshi Inaba, Hiromu Chiba, Xudong Yang, Shu Ping Lau

Research output: Journal article publication › Journal article › Academic research › peer-review

3 Citations (Scopus)

Abstract

To form several-micrometer-thick diamond-like carbon (DLC) films, pulse bias filtered cathodic vacuum arc deposition was performed, In this study, nonhydrogenated DLC films were evaluated using visible and ultraviolet Raman spectroscopy, an electron energy loss spectroscopy (EELS) and a nano indenter. All observations indicated that the sp3 ratio of the DLC films decreases with increasing applied pulse bias. However, a moderately high sp 3 ratio of 42.3% was obtained for 500-nm-thick PLC films with a compressive stress of 3.5 GPa formed at a pulse bias of 500 V, a pulse width of 25 μs, and a frequency of 1500Hz.

Original language	English
Pages (from-to)	7854-7859
Number of pages	6
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	45
Issue number	10 A
DOIs	https://doi.org/10.1143/JJAP.45.7854
Publication status	Published - 15 Oct 2006
Externally published	Yes

Keywords

Diamond-like carbon
EELS
Pulse bias filtered cathodic vacuum arc
UV raman

ASJC Scopus subject areas

General Engineering
General Physics and Astronomy

More information

10.1143/JJAP.45.7854

Cite this

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title = "Characterization of thick amorphous carbon films formed by pulse bias filtered cathodic vacuum arc",

abstract = "To form several-micrometer-thick diamond-like carbon (DLC) films, pulse bias filtered cathodic vacuum arc deposition was performed, In this study, nonhydrogenated DLC films were evaluated using visible and ultraviolet Raman spectroscopy, an electron energy loss spectroscopy (EELS) and a nano indenter. All observations indicated that the sp3 ratio of the DLC films decreases with increasing applied pulse bias. However, a moderately high sp 3 ratio of 42.3% was obtained for 500-nm-thick PLC films with a compressive stress of 3.5 GPa formed at a pulse bias of 500 V, a pulse width of 25 μs, and a frequency of 1500Hz.",

keywords = "Diamond-like carbon, EELS, Pulse bias filtered cathodic vacuum arc, UV raman",

author = "Nobuto Yasui and Hiroshi Inaba and Hiromu Chiba and Xudong Yang and Lau, {Shu Ping}",

year = "2006",

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doi = "10.1143/JJAP.45.7854",

language = "English",

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journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers",

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Characterization of thick amorphous carbon films formed by pulse bias filtered cathodic vacuum arc. / Yasui, Nobuto; Inaba, Hiroshi; Chiba, Hiromu et al.
In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 45, No. 10 A, 15.10.2006, p. 7854-7859.

Research output: Journal article publication › Journal article › Academic research › peer-review

TY - JOUR

T1 - Characterization of thick amorphous carbon films formed by pulse bias filtered cathodic vacuum arc

AU - Yasui, Nobuto

AU - Inaba, Hiroshi

AU - Chiba, Hiromu

AU - Yang, Xudong

AU - Lau, Shu Ping

PY - 2006/10/15

Y1 - 2006/10/15

N2 - To form several-micrometer-thick diamond-like carbon (DLC) films, pulse bias filtered cathodic vacuum arc deposition was performed, In this study, nonhydrogenated DLC films were evaluated using visible and ultraviolet Raman spectroscopy, an electron energy loss spectroscopy (EELS) and a nano indenter. All observations indicated that the sp3 ratio of the DLC films decreases with increasing applied pulse bias. However, a moderately high sp 3 ratio of 42.3% was obtained for 500-nm-thick PLC films with a compressive stress of 3.5 GPa formed at a pulse bias of 500 V, a pulse width of 25 μs, and a frequency of 1500Hz.

AB - To form several-micrometer-thick diamond-like carbon (DLC) films, pulse bias filtered cathodic vacuum arc deposition was performed, In this study, nonhydrogenated DLC films were evaluated using visible and ultraviolet Raman spectroscopy, an electron energy loss spectroscopy (EELS) and a nano indenter. All observations indicated that the sp3 ratio of the DLC films decreases with increasing applied pulse bias. However, a moderately high sp 3 ratio of 42.3% was obtained for 500-nm-thick PLC films with a compressive stress of 3.5 GPa formed at a pulse bias of 500 V, a pulse width of 25 μs, and a frequency of 1500Hz.

KW - Diamond-like carbon

KW - EELS

KW - Pulse bias filtered cathodic vacuum arc

KW - UV raman

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DO - 10.1143/JJAP.45.7854

M3 - Journal article

SN - 0021-4922

VL - 45

SP - 7854

EP - 7859

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

IS - 10 A

ER -

Characterization of thick amorphous carbon films formed by pulse bias filtered cathodic vacuum arc

Abstract

Keywords

ASJC Scopus subject areas

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