Characterization of ta-C films prepared by a two-step filtered vacuum arc deposition technique

D. Sheeja, B. K. Tay, Shu Ping Lau, X. Shi, J. Shi, Y. Li, X. Ding, E. Liu, Z. Sun

Research output: Journal article publicationJournal articleAcademic researchpeer-review

21 Citations (Scopus)

Abstract

Adhesive strength is one of the most important properties of a coating, and one which could be improved by preparing an interface layer with increased ion energy, i.e. by applying high substrate-bias voltage. Hence, an investigation has been carried out to study the effect of substrate-bias voltage, and of the interface layer on the mechanical and tribological properties of ta-C films. In this presentation, the films are prepared by a two-step process. A relatively thick, hard layer of ta-C film is deposited on top of a relatively thin soft adhesive (interface) layer, which is deposited on a silicon substrate. The thin soft adhesive (interface) layer was prepared with a different ion energy, by controlling the high voltage negative substrate-bias. The thick hard layer on the top was prepared without any substrate-bias. The influence of substrate-bias during the preparation of the interface layer on the properties (structural, mechanical and tribological) of the ta-C films was investigated. The results show that the adhesive strength can be improved to a great extent, without much damage to the mechanical and tribological properties of the coating.
Original languageEnglish
Pages (from-to)247-251
Number of pages5
JournalSurface and Coatings Technology
Volume127
Issue number2-3
Publication statusPublished - 22 May 2000
Externally publishedYes

Keywords

  • Adhesion
  • Filtered cathodic vacuum arc technique
  • Plasma ion implantation
  • Tetrahedral amorphous carbon
  • Tribological characteristics

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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