Characterization of surface generation for structured freeform surfaces

Chi Fai Cheung, Suet To, Wing Bun Lee, T. C. Kwok

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

Abstract

The paper presents a framework of a surface characterisation system for structured freeform surfaces such as micro-lens array, pyramids, etc. A pattern analysis method based on power spectrum analysis is proposed to recognize the errors and defects contained in these data sets into error and defect types, and the typical feature parameters are established for each identified error and defect type (scale, amplitude, etc.) and their values. The relationships between the features of different errors and defect types of the micro-lens array are also discussed.
Original languageEnglish
Title of host publicationProceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007
Publishereuspen
Pages266-269
Number of pages4
Volume1
ISBN (Electronic)0955308224, 9780955308222
Publication statusPublished - 1 Jan 2007
Event7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007 - Bremen, Germany
Duration: 20 May 200724 May 2007

Conference

Conference7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007
CountryGermany
CityBremen
Period20/05/0724/05/07

ASJC Scopus subject areas

  • Materials Science(all)
  • Instrumentation
  • Environmental Engineering
  • Industrial and Manufacturing Engineering
  • Mechanical Engineering

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