Abstract
This paper correlates photodisplacement thermal wave characterization of ion implanted silicon wafers with the lattice information provided by Rutherford Backscattering Spectrometry.
Original language | English |
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Title of host publication | ESSDERC 1989 - Proceedings of the 19th European Solid State Device Research Conference |
Publisher | IEEE Computer Society |
Pages | 929-932 |
Number of pages | 4 |
ISBN (Electronic) | 0387510001 |
ISBN (Print) | 9780387510002 |
Publication status | Published - 1 Jan 1989 |
Externally published | Yes |
Event | 19th European Solid State Device Research Conference, ESSDERC 1989 - Berlin, Germany Duration: 11 Sept 1989 → 14 Sept 1989 |
Conference
Conference | 19th European Solid State Device Research Conference, ESSDERC 1989 |
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Country/Territory | Germany |
City | Berlin |
Period | 11/09/89 → 14/09/89 |
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Safety, Risk, Reliability and Quality