Abstract
We present the design and the characterization of a polycrystalline silicon (Si)-based photonic crystal (PhC)-suspended membrane, working in the mid-infrared wavelengths. In order to facilitate transmission measurement, the PhC membrane is released by removing the underneath Si substrate. Around 97% reflection and 3% transmission at 3.58-μm wavelength are measured at room temperature. Characterization is also done at 450°C and it reveals that the peak reflection of the PhC membrane shifts by 75 nm to higher wavelengths. This corresponds to a linear wavelength shift of 0.174 nm/°C and the thermo-optic coefficient is calculated to be +1.70 × 10-4 K-1. By altering the dimension of the PhC air holes, it is also shown that such a thermo-optic effect is compensated.
| Original language | English |
|---|---|
| Article number | 084096 |
| Journal | Journal of Nanophotonics |
| Volume | 8 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - Jan 2014 |
| Externally published | Yes |
Keywords
- high temperature applications
- optics
- photonic crystal membrane
- thermo-optic effect
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
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