Characterization of polycrystalline silicon-based photonic crystal-suspended membrane for high temperature applications

Chong Pei Ho; Prakash Pitchappa; Piotr Kropelnicki; Jian Wang; Hong Cai; Yuandong Gu; Chengkuo Lee

doi:10.1117/1.JNP.8.084096

Characterization of polycrystalline silicon-based photonic crystal-suspended membrane for high temperature applications

Chong Pei Ho, Prakash Pitchappa, Piotr Kropelnicki, Jian Wang, Hong Cai, Yuandong Gu, Chengkuo Lee

Research output: Journal article publication › Journal article › Academic research › peer-review

18 Citations (Scopus)

Abstract

We present the design and the characterization of a polycrystalline silicon (Si)-based photonic crystal (PhC)-suspended membrane, working in the mid-infrared wavelengths. In order to facilitate transmission measurement, the PhC membrane is released by removing the underneath Si substrate. Around 97% reflection and 3% transmission at 3.58-μm wavelength are measured at room temperature. Characterization is also done at 450°C and it reveals that the peak reflection of the PhC membrane shifts by 75 nm to higher wavelengths. This corresponds to a linear wavelength shift of 0.174 nm/°C and the thermo-optic coefficient is calculated to be +1.70 × 10^-4 K^-1. By altering the dimension of the PhC air holes, it is also shown that such a thermo-optic effect is compensated.

Original language	English
Article number	084096
Journal	Journal of Nanophotonics
Volume	8
Issue number	1
DOIs	https://doi.org/10.1117/1.JNP.8.084096
Publication status	Published - Jan 2014
Externally published	Yes

Keywords

high temperature applications
optics
photonic crystal membrane
thermo-optic effect

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics

More information

10.1117/1.JNP.8.084096

Cite this

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abstract = "We present the design and the characterization of a polycrystalline silicon (Si)-based photonic crystal (PhC)-suspended membrane, working in the mid-infrared wavelengths. In order to facilitate transmission measurement, the PhC membrane is released by removing the underneath Si substrate. Around 97% reflection and 3% transmission at 3.58-μm wavelength are measured at room temperature. Characterization is also done at 450°C and it reveals that the peak reflection of the PhC membrane shifts by 75 nm to higher wavelengths. This corresponds to a linear wavelength shift of 0.174 nm/°C and the thermo-optic coefficient is calculated to be +1.70 × 10-4 K-1. By altering the dimension of the PhC air holes, it is also shown that such a thermo-optic effect is compensated.",

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AU - Ho, Chong Pei

AU - Pitchappa, Prakash

AU - Kropelnicki, Piotr

AU - Wang, Jian

AU - Cai, Hong

AU - Gu, Yuandong

AU - Lee, Chengkuo

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N2 - We present the design and the characterization of a polycrystalline silicon (Si)-based photonic crystal (PhC)-suspended membrane, working in the mid-infrared wavelengths. In order to facilitate transmission measurement, the PhC membrane is released by removing the underneath Si substrate. Around 97% reflection and 3% transmission at 3.58-μm wavelength are measured at room temperature. Characterization is also done at 450°C and it reveals that the peak reflection of the PhC membrane shifts by 75 nm to higher wavelengths. This corresponds to a linear wavelength shift of 0.174 nm/°C and the thermo-optic coefficient is calculated to be +1.70 × 10-4 K-1. By altering the dimension of the PhC air holes, it is also shown that such a thermo-optic effect is compensated.

AB - We present the design and the characterization of a polycrystalline silicon (Si)-based photonic crystal (PhC)-suspended membrane, working in the mid-infrared wavelengths. In order to facilitate transmission measurement, the PhC membrane is released by removing the underneath Si substrate. Around 97% reflection and 3% transmission at 3.58-μm wavelength are measured at room temperature. Characterization is also done at 450°C and it reveals that the peak reflection of the PhC membrane shifts by 75 nm to higher wavelengths. This corresponds to a linear wavelength shift of 0.174 nm/°C and the thermo-optic coefficient is calculated to be +1.70 × 10-4 K-1. By altering the dimension of the PhC air holes, it is also shown that such a thermo-optic effect is compensated.

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Characterization of polycrystalline silicon-based photonic crystal-suspended membrane for high temperature applications

Abstract

Keywords

ASJC Scopus subject areas

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