Abstract
Microstructure freeform surface is a type of freeform surfaces which is widely used in optical-mechanical-electronic components with increasing high precision requirement. This paper presents the characterization of structured freeform surfaces based on a pattern matching analysis method. The method employed rough matching by micro-structure features and then precise matching based on least squared criteria to optimize matching results. The capability of the proposed method is realized through a trial implementation of a prototype surface characterization system With the successful development of the pattern matching analysis method, the accuracy and the efficiency of the characterization of the microstructure freeform surfaces such as micro-lens array can be significantly increased.
| Original language | English |
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| Title of host publication | Proceedings of the 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE |
| Publication status | Published - 1 Dec 2008 |
| Event | 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE - Portland, OR, United States Duration: 19 Oct 2008 → 24 Oct 2008 |
Conference
| Conference | 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE |
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| Country/Territory | United States |
| City | Portland, OR |
| Period | 19/10/08 → 24/10/08 |
Keywords
- Fast tool servo machinin
- Form error
- Microlens array
- Microstructure freeform Surfaces
- Pattern matching
- Surface characterization
ASJC Scopus subject areas
- Mechanical Engineering