Characterization of microstructure freeform surfaces using a pattern matching analysis

Chi Fai Cheung, L. B. Kong, Wing Bun Lee, Suet To

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

Abstract

Microstructure freeform surface is a type of freeform surfaces which is widely used in optical-mechanical-electronic components with increasing high precision requirement. This paper presents the characterization of structured freeform surfaces based on a pattern matching analysis method. The method employed rough matching by micro-structure features and then precise matching based on least squared criteria to optimize matching results. The capability of the proposed method is realized through a trial implementation of a prototype surface characterization system With the successful development of the pattern matching analysis method, the accuracy and the efficiency of the characterization of the microstructure freeform surfaces such as micro-lens array can be significantly increased.
Original languageEnglish
Title of host publicationProceedings of the 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE
Publication statusPublished - 1 Dec 2008
Event23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE - Portland, OR, United States
Duration: 19 Oct 200824 Oct 2008

Conference

Conference23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE
Country/TerritoryUnited States
CityPortland, OR
Period19/10/0824/10/08

Keywords

  • Fast tool servo machinin
  • Form error
  • Microlens array
  • Microstructure freeform Surfaces
  • Pattern matching
  • Surface characterization

ASJC Scopus subject areas

  • Mechanical Engineering

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