Abstract
Post-treatment of the sensing film in tin oxide gas sensor arrays is widely used to improve the selectivity in gas recognition applications. This letter describes the characterization study of an integrated tin oxide gas sensor array chip in which the sensing films are modified using metal additives and ion implantations. Measurement results reveal that metal additives present a higher impact on the sensor sensitivity compared with ion implantations. The latter has no significant effect on the sensing properties. The drift is increased for the sensors with only ion implantation compared with the ones with metal additives. An array combining both post-treatment techniques is expected to improve the overall recognition performance.
| Original language | English |
|---|---|
| Article number | 4567518 |
| Pages (from-to) | 1397-1398 |
| Number of pages | 2 |
| Journal | IEEE Sensors Journal |
| Volume | 8 |
| Issue number | 8 |
| DOIs | |
| Publication status | Published - 1 Aug 2008 |
| Externally published | Yes |
Keywords
- Array
- Drift
- Post-treatment
- Tin oxide
ASJC Scopus subject areas
- Instrumentation
- Electrical and Electronic Engineering