Characterization of Ge 2Sb 2Te 5 thin film alloys using conductive-tip atomic force microscopy

C.M. Chang, Y.J. Liu, M.L. Tseng, N.-N. Chu, D.-W. Huang, M. Mansuripur, Din-ping Tsai

Research output: Journal article publicationJournal articleAcademic researchpeer-review

3 Citations (Scopus)


Conductive-tip atomic force microscopy (C-AFM) is a powerful tool for investigating the electrical characteristics of phase-change materials commonly used for electronic and optical data storage. We demonstrate the usefulness of this technique by examining the electrical conductivity of crystalline marks recorded with a focused laser pulse on a thin Ge 2Sb 2Te 5 film. © 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
Original languageEnglish
Pages (from-to)1945-1950
Number of pages6
JournalPhysica Status Solidi (B) Basic Research
Issue number10
Publication statusPublished - 1 Oct 2012
Externally publishedYes


  • Electronic data storage
  • Materials and process characterization
  • Optical recording
  • Phase-change materials

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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