Characterization of AZO and Ag based films prepared by RF magnetron sputtering

Dagang Miao, Shou-xiang Kinor Jiang, Hongmei Zhao, Songmin Shang, Zhuoming Chen

Research output: Journal article publicationJournal articleAcademic researchpeer-review

42 Citations (Scopus)


Ag, AZO/Ag, Ag/AZO and AZO/Ag/AZO films were prepared on glass substrates by radio frequency (RF) magnetron sputtering technology. The prepared films were systematically investigated by X-ray Diffraction (XRD), Atomic Force Microscopy (AFM), UV-visible spectrophotometer, a four-point probe system and Fourier Transform Infrared Spectroscopy. The results indicated that Ag inner layer starts forming a continuous film at the thickness of 10 nm and Ag layer presents superior crystallization on AZO substrate than that on glass substrate. The continuous Ag inner layer film provided the highest average visible transmittance of 85.4% (AZO/Ag/AZO). The lowest sheet resistance of 3.21 Ω/sq and the highest infrared reflection rate of 97% in FIR region can be obtained on AZO/Ag (15 nm)/AZO film. The high infrared reflection property of the AZO/Ag/AZO coating makes it a promising candidate for solar control films.
Original languageEnglish
Pages (from-to)26-31
Number of pages6
JournalJournal of Alloys and Compounds
Publication statusPublished - 15 Dec 2014


  • Ag
  • AZO
  • Infrared reflection
  • Multilayer thin film
  • RF magnetron sputtering

ASJC Scopus subject areas

  • Mechanics of Materials
  • Mechanical Engineering
  • Metals and Alloys
  • Materials Chemistry


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