Characteristics of micromachined injection locking lasers

H. Cai, B. Liu, J. Tamil, W. M. Zhu, J. F. Tao, W. Zhang, Q. X. Zhang, A. Q. Liu

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

Abstract

This paper reports a theoretical and experimental study of a MEMS injection-locked laser (ILL). The micromachined injection-locked laser consists of a MEMS tunable laser (master) and a Fabry-Pérot multimode laser (slave) that is integrated by using deep RIE processes onto a single chip. Based on the experimental results, hysteresis property in asymmetrical tuning curve is observed and optical bistability is found. Superior performances in terms of stability and narrow linewidth have been achieved.

Original languageEnglish
Title of host publicationTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages1353-1356
Number of pages4
DOIs
Publication statusPublished - Jun 2009
Externally publishedYes
EventTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems - Denver, CO, United States
Duration: 21 Jun 200925 Jun 2009

Publication series

NameTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Conference

ConferenceTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Country/TerritoryUnited States
CityDenver, CO
Period21/06/0925/06/09

Keywords

  • Deep RIE fabrication process
  • Injection locking laser
  • Photonic MEMS
  • Tunable lasers

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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